PRECISION MECHANICS
Nano-positioning
Paper Title Page
TUPYP012
 Mechanical Design of Water-cooled White Beam Collimating Bent Mirror System at HEPS  
 
  • J.Y. Wang, M. Li, Z.R. Ren, W.F. Sheng, S. Tang, R.Z. Xu
    IHEP, Beijing, People’s Republic of China
  
  The main function of the Water-cooled White Beam Collimating Bent Mirror is to align the synchrotron radiation light to improve the resolution of its downstream monochromator; It also absorbs heat and reduces the heat load transmitted to the monochromator. Therefore, the accuracy of its posture directly affects the quality of the output beam. This article discusses the design of the device. It is mainly divided into 3 parts. The bending mechanism uses constant external force to elastically bend the optical elements to obtain the required surface shape. The cooling mechanism is used to reduce the thermal deformation of the mirror surface, thus reducing the surface error of the mirror. The overall mechanical system provides 5-DOF attitude adjustment. Based on this, this design adopts a combination scheme of a four-bar bender with independent bending moment, the copper blades inserted in the GaIn eutectic filled trough solution and 5-DOF attitude adjustment of multi-layer granite. Through a series of calculations, simulations and tests, it is demonstrated that the design indexes meet the requirements, thus verifying the feasibility of the scheme.  
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TUPYP017 Design and Test of Precision Mechanics for High Energy Resolution Monochromator at the HEPS 51
 
  • L. Zhang, H. Liang, Z.K. Liu, W. Xu, Y. Yang, Y.S. Zhang
    IHEP, Beijing, People’s Republic of China
  
  A monochromator stands as a typical representative of optical component within synchrotron radiation light sources. High resolution monochromators (HRMs), which incorporate precision positioning, stability control, and various other technologies, are a crucial subclass within this category. The next generation of photon sources imposes higher performance standards upon these HRMs. In this new design framework, the primary focus is on innovating precision motion components. Rigorous analysis and experimentation have confirmed the effectiveness of this design. This structural model provides valuable reference for developing other precision adjustment mechanisms within the realm of synchrotron radiation.  
poster icon Poster TUPYP017 [3.641 MB]  
DOI • reference for this paper ※ doi:10.18429/JACoW-MEDSI2023-TUPYP017  
About • Received ※ 01 November 2023 — Revised ※ 03 November 2023 — Accepted ※ 08 November 2023 — Issued ※ 04 February 2024
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TUPYP027 A Subnanometer Linear Displacement Actuator 70
 
  • S.K. Jiang, X.W. Du, Q.P. Wang
    USTC/NSRL, Hefei, Anhui, People’s Republic of China
  
  With the development of synchrotron radiation technology, an actuator with sub-nanometer resolution, 100N driving force, and compatible with ultra-high vacuum environment is required. To achieve synchrotron radiation micro-nano focusing with adjustment resolution of sub-nanometer and high-precision rotation at the nano-arc level, most of the commercial piezoelectric actuators are difficult to meet the requirements of resolution and driving force at the same time. The flexure-based compound bridge-type hinge has the characteristic of amplifying or reducing the input displacement by a certain multiple, and can be used in an ultra-high vacuum environment. According to this characteristic, the bridge-type composite flexible hinge can be combined with commercial piezoelectric actuators, to design a new actuator with sub-nanometer resolution and a driving force of 100N. This poster mainly presents the principle of the new actuator, the design of the prototype and the preliminary test results of its resolution, stroke.  
poster icon Poster TUPYP027 [3.140 MB]  
DOI • reference for this paper ※ doi:10.18429/JACoW-MEDSI2023-TUPYP027  
About • Received ※ 25 October 2023 — Revised ※ 04 November 2023 — Accepted ※ 09 November 2023 — Issued ※ 25 January 2024
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TUPYP040
 Experimental Setup Design of Hard X-ray Coherent Scattering (HXCS) Beamline at HEPS  
 
  • Z.N. Ou, R.Y. Liao, S. Tang, X. Wang, H.H. Yu, L. Zhou
    IHEP, People’s Republic of China
  
  The HXCS is a dedicated coherent beamline of the High Energy Photon Source (HEPS). The experimental setup of the endstation mainly includes two devices: CDI/WAXS XPCS and SAXS XPCS. To achieve high stability requirements, the CDI/WAXS XPCS device use a nano-focusing AKB mirrors system, which will focus hard x-rays to a focal spot as small as 100 nm with a small working distance of 64 mm. In the narrow working distance, AKB mirror chamber and sample chamber are designed as a unit but separated from the middle. And the device is designed with two sets of switchable sample table, in order to flexibly carry out four coherent techniques. Due to high stability, the CDI/WAXS XPCS device is stringent designed for high stiffness, high temperature stability and metrology. Besides, the other important equipments of the beamline include a 1.5m WAXS tube and a 14m SAXS tube. For high-resolution applications, the WAXS tube can be rotated around the sample in the horizontal and vertical plane by 45°and the SAXS tube can adjust distance and angulation. At present, the whole experimental setup is designed according to the fine mechanical design which can meet the experimental requirements.  
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TUPYP041
 Design for Harmonic Suppression Mirrors Mechanical System with X-Ray Height Compensation Function at HEPS  
 
  • Z.R. Ren, M. Li, W.F. Sheng, S. Tang, L.R. Zheng
    IHEP, People’s Republic of China
  
  In view of the fact that the Harmonic Suppression Mirrors (HSMs) mechanical system under the fast scanning mode of the X-ray Absorption Spectroscopy Beamline (XAS Beamline) of High Energy Photon Source (HEPS) needs to have a X-ray height compensation function in addition to suppressing high harmonics. This paper introduces a high stability 9-axis HSMs mechanical system, which has a basic 5-DOF adjustment, and the relative position relationship between the two mirrors is adjustable. By changing the center distance between the two mirrors, the gap between the two mirrors, and adjusting the parallelism of the two mirrors, the goal of compensating the output X-ray height difference of the upstream Channel Cut Monochromator is achieved. The vacuum machinery volume of the entire HSMs mechanical system is relatively large, which reaches 1766mm. Movement travel of the second mirrors reaches 620mm. Currently, the vacuum machinery has been processed and further testing is being carried out.  
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TUPYP044
 Development of Typical Nano-KB/AKB Mirrors Mechanical System at HEPS  
 
  • H.H. Yu, M. Li, R.Y. Liao, W.F. Sheng, S. Tang, R.Z. Xu
    IHEP, People’s Republic of China
  • Y. Li
    BUAA, Beijing, People’s Republic of China
  • Y. Li
    Rejected, -, Tanzania
  • S. Tang, H.H. Yu
    UCAS, Beijing, People’s Republic of China
  
  Nano-KB/AKB mirrors are used to focus spot size to the nanometer level in main performance beamlines at HEPS, including the Hard X-ray Nanoprobe Multimodal Imaging Beamline(NAMI Beamline), the Hard X-ray Coherent Scattering Beamline(HXCS Beamline), and X-ray Absorption Spectroscopy Beamline(XAS Beamline), etc. For the typical Nano-KB/AKB mirrors mechanical system, a common design of the mounting and clamping mechanisms and the adjustment mechanisms is presented. There are also the key components of the Nano-KB/AKB mirrors mechanical system. Currently, through the design and optimisation of the mechanical structure and the corresponding finite element analysis(FEA), the first Nano-KB mirrors mechanical system at HEPS has been fabricated, and the large travel range, high resolution and high stability adjustments mechanisms are achieved, the slope error of the Nano-KB mirrors is well ensured simultaneously, and the test results are consistent with the design.  
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WEOBM06
 Extension of the IXS High Resolution Monochromator for the RIXS experiment at the Petra III Beamline P01  
 
  • F.U. Dill
    DESY, Hamburg, Germany
  
  The IXS High Resolution Monochromator at P01 is used for the intermediate X-Ray regime from 2.5keV to 3.5keV. The core component is a disk that carries the crystals. At the circumfence an encoder ring is mounted. A radial and axial runout of less than 1µm during the rotation is guaranteed by a high precision spindle bearing. The rotation is done by a PiezoLEG with a 110mm long ceramic bar that is coupled to the disk via a wire and provides an angular resolution better than 100nrad. The setup is in operation since mid 2017 with four crystals. In spring 2021 two additonal moving units where installed to position eight crystals in total. An enlargement of the angular range for the in-line setup is planned for spring 2024.  
slides icon Slides WEOBM06 [7.534 MB]  
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WEOBM07 Design, Modeling and Analysis of a Novel Piezoactuated XY Nanopositioner Supporting Beamline Optical Scanning 150
 
  • L.F. Wang, G.C. Chang, S. Tang, Z.Y. Yue, L. Zhang
    IHEP, Beijing, People’s Republic of China
  
  In recent years, with the advancement of X-ray optics technology, the spot size of synchrotron beamlines has been reduced to 10nm or even smaller. The reduction in spot size and the emergence of ultra-bright synchrotron sources necessitate higher stability, resolution, and faster scanning speeds for positioning systems. This paper presents the design, analysis, and simulation of an XY piezoelectric driven nanopositioning platform that supports high-precision optical scanning systems. To achieve fast and highly precise motion under the load of an optical system, a design scheme based on a hollow structure with flexible amplification and guiding mechanisms is proposed. This scheme increases displacement output while minimizing coupling displacement to ensure a high natural frequency. The rationality of this platform design is verified through modeling and finite element simulation.  
slides icon Slides WEOBM07 [3.448 MB]  
DOI • reference for this paper ※ doi:10.18429/JACoW-MEDSI2023-WEOBM07  
About • Received ※ 02 November 2023 — Revised ※ 03 November 2023 — Accepted ※ 04 November 2023 — Issued ※ 18 April 2024
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THPPP017
 Beamline Components of Ultimate Stability and Precision  
 
  • W. Diete, A. Andrianov, A. Schacht, I. Schweizer, S. Szillat, C. Venkataraman, T. Waterstradt, U. Wiesemann
    AXILON AG, Huerth, Germany
  
  The continuous advances towards diffraction-limited synchrotron light sources and free electron laser facilities (FEL) require beamline components with ever-increasing optical and mechanical performance. Key aspects are the positional stability of the x-ray beam at the experiment and the quality of the installed optical elements. AXILON is a worldwide leading company providing state-of-the-art beamline equipment for high-end beamlines. In this poster we provide an overview of our recent achievements for beamline components. Results of our newest generation of cryo-cooled monochromators demonstrate ultimate performance achieving beam stabilities well below 50 nrad. Latest mirror systems, including mechanical benders, also achieve similar beam stabilities with the bending mechanism preserving the mirror quality with slope errors below 100nrad rms, even when bent to the final elliptical shape. Finally, we give an update on our achievements with X-ray microscopes providing design concepts and first test results of a new microscope for ptychography, with a targeted positioning stability of 1-2nm.  
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THPPP018
 Delta Robot 2.0: The Nano-Positioning System for the Hard X-ray Nanoprobe at the Australian Synchrotron.  
 
  • M. Semeraro, N. Afshar, C.M. Kewish, J. McKinlay, C. Morey, M.D. de Jonge
    AS - ANSTO, Clayton, Australia
  • J.H. Kelly
    DLS, Oxfordshire, United Kingdom
  
  A nano-positioning system for the Nanoprobe beamline at the ANSTO Australian Synchrotron has been designed in collaboration with Diamond Light Source (DLS). Based on the DLS I14 delta robot [1], this design extends the bandwidth and uses an interferometer arrangement that reduces Abbe errors to improve positioning stability at high scan rate. Voice coil actuators and advanced control algorithms target precise and stable scanning with 3¿mm range in XYZ with 10 nm-rms stability; a significant challenge that was used to upskill in mechatronics engineering across our facility and improve design collaboration between mechanical and controls engineering groups. In addition to scanning, 360° rotation and 50¿mm focusing, and automated sample exchange are supported. The design, fabrication, and construction of the system is discussed, with preliminary results demonstrating its performance in terms of positioning accuracy, stability, and repeatability. This work represents an advance in the development of nanoprobe positioning systems for X-ray microscopy, with promising outlook for a range of scientific and engineering applications.
[1] J. Kelly, et al. Rev. Sci. Instrum. 92(4), 043712 (2022) 		 
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THPPP021
 Ultra-Stable and Multi-DOF Bent KB Mirror Mechanical System for Hard X-Ray High Energy Resolution Spectroscopy (HX-HERS) Beamline of HEPS  
 
  • R.Z. Xu, M. Li, W.F. Sheng, S. Tang, H.H. Yu
    IHEP, Beijing, People’s Republic of China
  
  The KB mirror system designed for the HX-HERS beamline was expected to focus the spot size down to 2¿m×2¿m and achieve 5-DOF adjustment of each mirror. However, the long mirror length leaded large size of the overall mechanism and the limited height space for multi-dimensional adjustment makes the mechanical design of the KB system with both stability and functionality difficult. In this KB system, each mirror is bent by a four-bar bender universally used in HEPS to obtain the required profile. A combination of parallel and serial mechanism with totally 11-DOF is designed to realize the adjustment requirements. Specifically, the parallel mechanism is a three-point support design that serves as the base of the KB mirror chamber and offers coarse tuning of 5-DOF, exhibiting great compactness and high stiffness. The series mechanism is a stacking of four angle and two displacement adjustment mechanisms up to 6-DOF. These independent stages with high resolution are assigned to VFM and HFM respectively to achieve fine adjustment of their relative positions. In the design of each angle and displacement adjustment stage, the height and rigidity of the mechanism are also fully considered.  
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THPPP022
 A compact direct measurement method for relative positioning of KB mirrors nano-experimental apparatus based on grating interferometers  
 
  • S. Tang, T. He, M. Li, R.Y. Liao, Z.N. Ou, W.F. Sheng, Y. Tao, H.H. Yu, L. Zhou
    IHEP, Beijing, People’s Republic of China
  • T. He
    University of Chinese Academy of Sciences, Beijing, People’s Republic of China
  • H.H. Yu
    UCAS, Beijing, People’s Republic of China
  
  Funding: This work is supported by the project of High Energy Photon Source (HEPS).
Positioning measurement is regraded as an effective way for the position compensation and feedback of nano-experimental apparatus. However, it usually suffers many restrictions from the complicated applied occasion of a typical performance beamline for next-generation synchrotron radiation light source. To deal with the problem, a compact direct measurement method based on grating interferometers is presented. The principle, configuration, experiment are designed and implemented for the verification of the feasibility. It performs a high resolution in orthogonal/lateral direction relative to laser beam, which can overcome an infeasible shortage of a typical interferometer for direct lateral positioning. So, it is used for positioning measurement & compensation between KB mirrors and nano-stages of a sample for the experiments of CDI, bragg-CDI, pytchograph, XPCS, etc. Compared with the existed methods, huge frame, two vacuum chambers restriction, multi-axis interferometer and benchmark relay are avoided for the compact system by using proposed method. 		 
poster icon Poster THPPP022 [2.006 MB]  
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