JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
TY - CONF AU - Jiang, S.K. AU - Du, X.W. AU - Wang, Q.P. ED - Schaa, Volker R.W. ED - Bian, Lin ED - Chen, Zhichu ED - Dong, Yuhui ED - He, Ping TI - A Subnanometer Linear Displacement Actuator J2 - Proc. of MEDSI2023, Beijing, China, 06-10 November 2023 CY - Beijing, China T2 - International Conference on Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation T3 - 12 LA - english AB - With the development of synchrotron radiation technology, an actuator with sub-nanometer resolution, 100N driving force, and compatible with ultra-high vacuum environment is required. To achieve synchrotron radiation micro-nano focusing with adjustment resolution of sub-nanometer and high-precision rotation at the nano-arc level, most of the commercial piezoelectric actuators are difficult to meet the requirements of resolution and driving force at the same time. The flexure-based compound bridge-type hinge has the characteristic of amplifying or reducing the input displacement by a certain multiple, and can be used in an ultra-high vacuum environment. According to this characteristic, the bridge-type composite flexible hinge can be combined with commercial piezoelectric actuators, to design a new actuator with sub-nanometer resolution and a driving force of 100N. This poster mainly presents the principle of the new actuator, the design of the prototype and the preliminary test results of its resolution, stroke. PB - JACoW Publishing CP - Geneva, Switzerland SP - 70 EP - 72 KW - site KW - laser KW - synchrotron KW - vacuum KW - experiment DA - 2024/07 PY - 2024 SN - 2673-5520 SN - 978-3-95450-250-9 DO - doi:10.18429/JACoW-MEDSI2023-TUPYP027 UR - https://jacow.org/medsi2023/papers/tupyp027.pdf ER -