JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
TY - CONF AU - Wang, L.F. AU - Chang, G.C. AU - Tang, S. AU - Yue, Z.Y. AU - Zhang, L. ED - Schaa, Volker R.W. ED - Bian, Lin ED - Chen, Zhichu ED - Dong, Yuhui ED - He, Ping TI - Design, Modeling and Analysis of a Novel Piezoactuated XY Nanopositioner Supporting Beamline Optical Scanning J2 - Proc. of MEDSI2023, Beijing, China, 06-10 November 2023 CY - Beijing, China T2 - International Conference on Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation T3 - 12 LA - english AB - In recent years, with the advancement of X-ray optics technology, the spot size of synchrotron beamlines has been reduced to 10nm or even smaller. The reduction in spot size and the emergence of ultra-bright synchrotron sources necessitate higher stability, resolution, and faster scanning speeds for positioning systems. This paper presents the design, analysis, and simulation of an XY piezoelectric driven nanopositioning platform that supports high-precision optical scanning systems. To achieve fast and highly precise motion under the load of an optical system, a design scheme based on a hollow structure with flexible amplification and guiding mechanisms is proposed. This scheme increases displacement output while minimizing coupling displacement to ensure a high natural frequency. The rationality of this platform design is verified through modeling and finite element simulation. PB - JACoW Publishing CP - Geneva, Switzerland SP - 150 EP - 153 KW - simulation KW - synchrotron KW - coupling KW - GUI KW - controls DA - 2024/07 PY - 2024 SN - 2673-5520 SN - 978-3-95450-250-9 DO - doi:10.18429/JACoW-MEDSI2023-WEOBM07 UR - https://jacow.org/medsi2023/papers/weobm07.pdf ER -