JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
TY - UNPB AU - Tang, S. AU - He, T. AU - Li, M. AU - Liao, R.Y. AU - Ou, Z.N. AU - Sheng, W.F. AU - Tao, Y. AU - Yu, H.H. AU - Zhou, L. ED - Schaa, Volker R.W. ED - Bian, Lin ED - Chen, Zhichu ED - Dong, Yuhui ED - He, Ping TI - A compact direct measurement method for relative positioning of KB mirrors nano-experimental apparatus based on grating interferometers J2 - Proc. of MEDSI2023, Beijing, China, 06-10 November 2023 CY - Beijing, China T2 - International Conference on Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation T3 - 12 LA - english AB - Positioning measurement is regraded as an effective way for the position compensation and feedback of nano-experimental apparatus. However, it usually suffers many restrictions from the complicated applied occasion of a typical performance beamline for next-generation synchrotron radiation light source. To deal with the problem, a compact direct measurement method based on grating interferometers is presented. The principle, configuration, experiment are designed and implemented for the verification of the feasibility. It performs a high resolution in orthogonal/lateral direction relative to laser beam, which can overcome an infeasible shortage of a typical interferometer for direct lateral positioning. So, it is used for positioning measurement & compensation between KB mirrors and nano-stages of a sample for the experiments of CDI, bragg-CDI, pytchograph, XPCS, etc. Compared with the existed methods, huge frame, two vacuum chambers restriction, multi-axis interferometer and benchmark relay are avoided for the compact system by using proposed method. PB - JACoW Publishing CP - Geneva, Switzerland ER -