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@unpublished{tang:medsi2023-thppp022, author = {S. Tang and T. He and M. Li and R.Y. Liao and Z.N. Ou and W.F. Sheng and Y. Tao and H.H. Yu and L. Zhou}, % author = {S. Tang and T. He and M. Li and R.Y. Liao and Z.N. Ou and W.F. Sheng and others}, % author = {S. Tang and others}, title = {{A compact direct measurement method for relative positioning of KB mirrors nano-experimental apparatus based on grating interferometers}}, % booktitle = {Proc. MEDSI'23}, booktitle = {Proc. Int. Conf. Mech. Eng. Design Synchrotron Radiat. Equip. Instrum. (MEDSI'23)}, eventdate = {2023-11-06/2023-11-10}, language = {english}, intype = {presented at the}, series = {International Conference on Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation}, number = {12}, venue = {Beijing, China}, publisher = {JACoW Publishing, Geneva, Switzerland}, month = {07}, year = {2024}, note = {presented at MEDSI'23 in Beijing, China, unpublished}, abstract = {{Positioning measurement is regraded as an effective way for the position compensation and feedback of nano-experimental apparatus. However, it usually suffers many restrictions from the complicated applied occasion of a typical performance beamline for next-generation synchrotron radiation light source. To deal with the problem, a compact direct measurement method based on grating interferometers is presented. The principle, configuration, experiment are designed and implemented for the verification of the feasibility. It performs a high resolution in orthogonal/lateral direction relative to laser beam, which can overcome an infeasible shortage of a typical interferometer for direct lateral positioning. So, it is used for positioning measurement & compensation between KB mirrors and nano-stages of a sample for the experiments of CDI, bragg-CDI, pytchograph, XPCS, etc. Compared with the existed methods, huge frame, two vacuum chambers restriction, multi-axis interferometer and benchmark relay are avoided for the compact system by using proposed method.}}, }