JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
@inproceedings{jiang:medsi2023-tupyp027,
author = {S.K. Jiang and X.W. Du and Q.P. Wang},
title = {{A Subnanometer Linear Displacement Actuator}},
% booktitle = {Proc. MEDSI'23},
booktitle = {Proc. 12th Int. Conf. Mech. Eng. Design Synchrotron Radiat. Equip. Instrum. (MEDSI'23)},
eventdate = {2023-11-06/2023-11-10},
pages = {70--72},
paper = {TUPYP027},
language = {english},
keywords = {site, laser, synchrotron, vacuum, experiment},
venue = {Beijing, China},
series = {International Conference on Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation},
number = {12},
publisher = {JACoW Publishing, Geneva, Switzerland},
month = {07},
year = {2024},
issn = {2673-5520},
isbn = {978-3-95450-250-9},
doi = {10.18429/JACoW-MEDSI2023-TUPYP027},
url = {https://jacow.org/medsi2023/papers/tupyp027.pdf},
abstract = {{With the development of synchrotron radiation technology, an actuator with sub-nanometer resolution, 100N driving force, and compatible with ultra-high vacuum environment is required. To achieve synchrotron radiation micro-nano focusing with adjustment resolution of sub-nanometer and high-precision rotation at the nano-arc level, most of the commercial piezoelectric actuators are difficult to meet the requirements of resolution and driving force at the same time. The flexure-based compound bridge-type hinge has the characteristic of amplifying or reducing the input displacement by a certain multiple, and can be used in an ultra-high vacuum environment. According to this characteristic, the bridge-type composite flexible hinge can be combined with commercial piezoelectric actuators, to design a new actuator with sub-nanometer resolution and a driving force of 100N. This poster mainly presents the principle of the new actuator, the design of the prototype and the preliminary test results of its resolution, stroke.}},
}