MEDSI2023 - List of Authors (Yuan, H.J.)

Paper	Title	Page
TUPYP032	An Argon-Oxygen or Argon-Hydrogen Radio-Frequency Plasma Cleaning Device for Removing Carbon Contamination from Optical Surfaces	79
	H.J. Yuan, X.W. Du, Q.P. Wang USTC/NSRL, Hefei, Anhui, People’s Republic of China
	Due to synchrotron radiation, carbon contamination on the surfaces of optical elements inside the beamlines, such as mirrors and gratings, remains an issue. Future beamline designs will select more optical element surface coating materials according to the specific needs, including gold, platinum, chromium, nickel, and aluminum, and a single cleaning method will not be able to adequately address the demands. We have studied the RF plasma cleaning of optical elements. After the argon/oxygen or argon/hydrogen gas mixture was injected into the chamber, glow discharge was carried out, and the carbon on the surface of the inert metal-coated optical element and oxidation-prone metal-coated optical element was removed by the oxidation or reduction reaction of radicals. In order to optimize the discharge parameters, it utilizes a differential mass spectrometry system and an optical emission spectrometer to monitor the cleaning process. This paper introduces the principles of the two cleaning methods as well as our existing cleaning device.
	Poster TUPYP032 [2.493 MB]
DOI •	reference for this paper ※ doi:10.18429/JACoW-MEDSI2023-TUPYP032
About •	Received ※ 25 October 2023 — Revised ※ 04 November 2023 — Accepted ※ 08 November 2023 — Issued ※ 19 December 2023
Cite •	reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)

Paper

Title

Page

An Argon-Oxygen or Argon-Hydrogen Radio-Frequency Plasma Cleaning Device for Removing Carbon Contamination from Optical Surfaces

79

H.J. Yuan, X.W. Du, Q.P. Wang
USTC/NSRL, Hefei, Anhui, People’s Republic of China

Due to synchrotron radiation, carbon contamination on the surfaces of optical elements inside the beamlines, such as mirrors and gratings, remains an issue. Future beamline designs will select more optical element surface coating materials according to the specific needs, including gold, platinum, chromium, nickel, and aluminum, and a single cleaning method will not be able to adequately address the demands. We have studied the RF plasma cleaning of optical elements. After the argon/oxygen or argon/hydrogen gas mixture was injected into the chamber, glow discharge was carried out, and the carbon on the surface of the inert metal-coated optical element and oxidation-prone metal-coated optical element was removed by the oxidation or reduction reaction of radicals. In order to optimize the discharge parameters, it utilizes a differential mass spectrometry system and an optical emission spectrometer to monitor the cleaning process. This paper introduces the principles of the two cleaning methods as well as our existing cleaning device.

Poster TUPYP032 [2.493 MB]

DOI •

reference for this paper ※ doi:10.18429/JACoW-MEDSI2023-TUPYP032

About •

Received ※ 25 October 2023 — Revised ※ 04 November 2023 — Accepted ※ 08 November 2023 — Issued ※ 19 December 2023

Cite •

reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)