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Text/Word citation export for TUPYP032: An Argon-Oxygen or Argon-Hydrogen Radio-Frequency Plasma Cleaning Device for Removing Carbon Contamination from Optical Surfaces

H.J. Yuan, X.W. Du, and Q.P. Wang, “An Argon-Oxygen or Argon-Hydrogen Radio-Frequency Plasma Cleaning Device for Removing Carbon Contamination from Optical Surfaces”, in Proc. 12th Int. Conf. Mech. Eng. Design Synchrotron Radiat. Equip. Instrum. (MEDSI'23), Beijing, China, Nov. 2023, pp.~79-81. doi:10.18429/JACoW-MEDSI2023-TUPYP032