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MOPVA104 | Physical Vapour Deposition of NbTiN Thin Films for Superconducting RF Cavities | cathode, power-supply, SRF, target | 1102 |
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The production of superconducting coatings for radio frequency cavities is a rapidly developing field that should ultimately lead to acceleration gradients greater than those obtained by bulk Nb RF cavities. The use of thin films made from superconductors with thermodynamic critical field, HC>HCNb, allows the possibility of multilayer superconductor ' insulator ' superconductor (SIS) films and accelerators that could operate at temperatures above the 2 K typically used. SIS films theoretically allow increased acceleration gradient due to magnetic shielding of underlying superconducting layers [1] and higher operating temperature can reduce cost [2]. High impulse magnetron sputtering (HiPIMS) and pulsed DC magnetron sputtering processes were used to deposit NbTiN thin films onto Si(100) substrate. The films were characterised using scanning electron microscopy (SEM), x-ray diffraction (XRD), Rutherford back-scattering spectroscopy (RBS) and a four-point probe. | |||
DOI • | reference for this paper ※ https://doi.org/10.18429/JACoW-IPAC2017-MOPVA104 | ||
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MOPVA144 | Post-Processing of Nb3Sn Coated Nb | niobium, SRF, cavity, experiment | 1190 |
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Funding: Supported by the U.S. Department of Energy, Office of Science, Office of Nuclear Physics under contract DEÂAC05Â06OR23177 and Office of High Energy Physics under grant SC00144475. Practical SRF cavities may be subjected to one or more processes after nominally complete preparation. Successful implementation of such processes in Nb3Sn coated cavities requires the understanding of material's response to these treatments. SRF-grade Nb samples, coated with Nb3Sn by the widely used tin vapor diffusion process were subjected to one or more of the following: hydrofluoric acid (HF) rinsing, oxypolishing, buffered chemical polishing (BCP) or electrochemical treatment. They were examined by materials characterization tech-niques including scanning electron microscopy (SEM) with energy dispersive X-ray spectroscopy (EDS), atomic force microscopy (AFM), and X-ray photoelectron spec-troscopy (XPS). The effects compared to niobium are different enough in most cases that further development is desirable to routinely obtain a favorable result. |
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DOI • | reference for this paper ※ https://doi.org/10.18429/JACoW-IPAC2017-MOPVA144 | ||
Export • | reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml) | ||