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BiBTeX citation export for MOPVA104: Physical Vapour Deposition of NbTiN Thin Films for Superconducting RF Cavities
@InProceedings{Wilde:IPAC2017-MOPVA104,
  author       = {S. Wilde and others},
  title        = {{P}hysical {V}apour {D}eposition of {N}b{T}i{N} {T}hin {F}ilms for {S}uperconducting {RF} {C}avities},
  booktitle    = {Proc. of International Particle Accelerator Conference (IPAC'17),
                  Copenhagen, Denmark, 14–19 May, 2017},
  pages        = {1102--1104},
  paper        = {MOPVA104},
  language     = {english},
  keywords     = {cathode, power-supply, SRF, target, superconductivity},
  venue        = {Copenhagen, Denmark},
  series       = {International Particle Accelerator Conference},
  number       = {8},
  publisher    = {JACoW},
  address      = {Geneva, Switzerland},
  month        = {May},
  year         = {2017},
  isbn         = {978-3-95450-182-3},
  doi          = {https://doi.org/10.18429/JACoW-IPAC2017-MOPVA104},
  url          = {http://jacow.org/ipac2017/papers/mopva104.pdf},
  note         = {https://doi.org/10.18429/JACoW-IPAC2017-MOPVA104},
}