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TY - CONF AU - Wilde, S. AU - Alves, E. AU - Barradas, N.P. AU - Chesca, B. AU - Hannah, A.N. AU - Malyshev, O.B. AU - Pattalwar, N. AU - Pattalwar, S.M. AU - Stenning, G.B.G. AU - Valizadeh, R. ED - Schaa, Volker RW ED - Arduini, Gianluigi ED - Pranke, Juliana ED - Seidel, Mike ED - Lindroos, Mats TI - Physical Vapour Deposition of NbTiN Thin Films for Superconducting RF Cavities J2 - Proc. of IPAC2017, Copenhagen, Denmark, 14â19 May, 2017 C1 - Copenhagen, Denmark T2 - International Particle Accelerator Conference T3 - 8 LA - english AB - The production of superconducting coatings for radio frequency cavities is a rapidly developing field that should ultimately lead to acceleration gradients greater than those obtained by bulk Nb RF cavities. The use of thin films made from superconductors with thermodynamic critical field, H_{C}>H_{C}^{N}b, allows the possibility of multilayer superconductor ' insulator ' superconductor (SIS) films and accelerators that could operate at temperatures above the 2 K typically used. SIS films theoretically allow increased acceleration gradient due to magnetic shielding of underlying superconducting layers [1] and higher operating temperature can reduce cost [2]. High impulse magnetron sputtering (HiPIMS) and pulsed DC magnetron sputtering processes were used to deposit NbTiN thin films onto Si(100) substrate. The films were characterised using scanning electron microscopy (SEM), x-ray diffraction (XRD), Rutherford back-scattering spectroscopy (RBS) and a four-point probe. PB - JACoW CP - Geneva, Switzerland SP - 1102 EP - 1104 KW - cathode KW - power-supply KW - SRF KW - target KW - superconductivity DA - 2017/05 PY - 2017 SN - 978-3-95450-182-3 DO - 10.18429/JACoW-IPAC2017-MOPVA104 UR - http://jacow.org/ipac2017/papers/mopva104.pdf ER -