JACoW logo

Joint Accelerator Conferences Website

The Joint Accelerator Conferences Website (JACoW) is an international collaboration that publishes the proceedings of accelerator conferences held around the world.


RIS citation export for MOPVA104: Physical Vapour Deposition of NbTiN Thin Films for Superconducting RF Cavities

TY - CONF
AU - Wilde, S.
AU - Alves, E.
AU - Barradas, N.P.
AU - Chesca, B.
AU - Hannah, A.N.
AU - Malyshev, O.B.
AU - Pattalwar, N.
AU - Pattalwar, S.M.
AU - Stenning, G.B.G.
AU - Valizadeh, R.
ED - Schaa, Volker RW
ED - Arduini, Gianluigi
ED - Pranke, Juliana
ED - Seidel, Mike
ED - Lindroos, Mats
TI - Physical Vapour Deposition of NbTiN Thin Films for Superconducting RF Cavities
J2 - Proc. of IPAC2017, Copenhagen, Denmark, 14–19 May, 2017
C1 - Copenhagen, Denmark
T2 - International Particle Accelerator Conference
T3 - 8
LA - english
AB - The production of superconducting coatings for radio frequency cavities is a rapidly developing field that should ultimately lead to acceleration gradients greater than those obtained by bulk Nb RF cavities. The use of thin films made from superconductors with thermodynamic critical field, H_{C}>H_{C}^{N}b, allows the possibility of multilayer superconductor ' insulator ' superconductor (SIS) films and accelerators that could operate at temperatures above the 2 K typically used. SIS films theoretically allow increased acceleration gradient due to magnetic shielding of underlying superconducting layers [1] and higher operating temperature can reduce cost [2]. High impulse magnetron sputtering (HiPIMS) and pulsed DC magnetron sputtering processes were used to deposit NbTiN thin films onto Si(100) substrate. The films were characterised using scanning electron microscopy (SEM), x-ray diffraction (XRD), Rutherford back-scattering spectroscopy (RBS) and a four-point probe.
PB - JACoW
CP - Geneva, Switzerland
SP - 1102
EP - 1104
KW - cathode
KW - power-supply
KW - SRF
KW - target
KW - superconductivity
DA - 2017/05
PY - 2017
SN - 978-3-95450-182-3
DO - 10.18429/JACoW-IPAC2017-MOPVA104
UR - http://jacow.org/ipac2017/papers/mopva104.pdf
ER -