Keyword: coupling
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WEYZO02 Design of a 2.45 GHz Surface Wave Plasma Source for Plasma Flood Gun plasma, electron, ECR, ion-source 143
 
  • S.X. Peng, J.E. Chen, B.J. Cui, Z.Y. Guo, Y.X. Jiang, K. Li, T.H. Ma, J.M. Wen, W.B. Wu, Y. Xu, A.L. Zhang, J.F. Zhang, T. Zhang
    PKU, Beijing, People’s Republic of China
 
  Plasma ’ood guns (PFGs) are widely used to neutralize wafer charge during the doping process in modern ion implanters. Compared with traditional dc arc discharge with filament and RF discharge, the microwave driven source that has long lifetime and has no metallic contamination is regarded as a potential choice of PFG [1]. Attempt to develop a large scale PFG based on 2.45 GHz microwave driven sources was launched at Peking University (PKU). A prototype one is a miniaturized 2.45 GHz permanent magnet electron cyclotron resonance (ECR) source to produce point-like electron beam. In previous experiments, more than 8 mA electron beam has been extracted with a ’6 mm extraction hole at an input microwave power of 22 W with argon gas [2]. Recently, studies are focusing on the possibility of producing of ribbon electron beams as PFG with 2.45GHz microwave driven surface wave plasma (SWP) source. A cylindrical chamber surface wave plasma generator with a using cylindrical dielectric waveguide and a 70 mm×3 mm extraction slit was fabricated. The primary test results were obtained. More details of this PFGs will be discussed in this work.
References
[1] B. Vanderberg, et al. AIP Conference Proceedings, 1496(1), 356 (2012).
[2] Yaoxiang Jiang, Shixiang Peng, et al, Review of Scientific Instruments, 91, 033319 (2020).
 
slides icon Slides WEYZO02 [5.475 MB]  
DOI • reference for this paper ※ https://doi.org/10.18429/JACoW-ECRIS2020-WEYZO02  
About • Received ※ 28 September 2020 — Revised ※ 29 December 2020 — Accepted ※ 25 April 2022 — Issue date ※ 14 July 2022
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