JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
TY - CONF AU - Peng, S.X. AU - Chen, J.E. AU - Cui, B.J. AU - Guo, Z.Y. AU - Jiang, Y.X. AU - Li, K. AU - Ma, T.H. AU - Wen, J.M. AU - Wu, W.B. AU - Xu, Y. AU - Zhang, A.L. AU - Zhang, J.F. AU - Zhang, T. ED - Machicoane, Guillaume ED - Allen, Alexa ED - Lesage, Ana ED - Schaa, Volker R.W. TI - Design of a 2.45 GHz Surface Wave Plasma Source for Plasma Flood Gun J2 - Proc. of ECRIS2020, East Lansing, MI, USA, 28-30 September 2020 CY - East Lansing, MI, USA T2 - International Workshop on ECR Ion Sources T3 - 24 LA - english AB - Plasma ’ood guns (PFGs) are widely used to neutralize wafer charge during the doping process in modern ion implanters. Compared with traditional dc arc discharge with filament and RF discharge, the microwave driven source that has long lifetime and has no metallic contamination is regarded as a potential choice of PFG [1]. Attempt to develop a large scale PFG based on 2.45 GHz microwave driven sources was launched at Peking University (PKU). A prototype one is a miniaturized 2.45 GHz permanent magnet electron cyclotron resonance (ECR) source to produce point-like electron beam. In previous experiments, more than 8 mA electron beam has been extracted with a ’6 mm extraction hole at an input microwave power of 22 W with argon gas [2]. Recently, studies are focusing on the possibility of producing of ribbon electron beams as PFG with 2.45GHz microwave driven surface wave plasma (SWP) source. A cylindrical chamber surface wave plasma generator with a using cylindrical dielectric waveguide and a 70 mm×3 mm extraction slit was fabricated. The primary test results were obtained. More details of this PFGs will be discussed in this work. PB - JACoW Publishing CP - Geneva, Switzerland SP - 143 EP - 145 KW - plasma KW - electron KW - ECR KW - ion-source KW - coupling DA - 2022/07 PY - 2022 SN - 2222-5692 SN - 978-3-95450-226-4 DO - doi:10.18429/JACoW-ECRIS2020-WEYZO02 UR - https://jacow.org/ecris2020/papers/weyzo02.pdf ER -