JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
@inproceedings{peng:ecris2020-weyzo02,
author = {S.X. Peng and J.E. Chen and B.J. Cui and Z.Y. Guo and Y.X. Jiang and K. Li and T.H. Ma and J.M. Wen and W.B. Wu and Y. Xu and A.L. Zhang and J.F. Zhang and T. Zhang},
% author = {S.X. Peng and J.E. Chen and B.J. Cui and Z.Y. Guo and Y.X. Jiang and K. Li and others},
% author = {S.X. Peng and others},
title = {{Design of a 2.45 GHz Surface Wave Plasma Source for Plasma Flood Gun}},
booktitle = {Proc. ECRIS'20},
% booktitle = {Proc. 24th International Workshop on ECR Ion Sources (ECRIS'20)},
pages = {143--145},
eid = {WEYZO02},
language = {english},
keywords = {plasma, electron, ECR, ion-source, coupling},
venue = {East Lansing, MI, USA},
series = {International Workshop on ECR Ion Sources},
number = {24},
publisher = {JACoW Publishing, Geneva, Switzerland},
month = {07},
year = {2022},
issn = {2222-5692},
isbn = {978-3-95450-226-4},
doi = {10.18429/JACoW-ECRIS2020-WEYZO02},
url = {https://jacow.org/ecris2020/papers/weyzo02.pdf},
abstract = {{Plasma ’ood guns (PFGs) are widely used to neutralize wafer charge during the doping process in modern ion implanters. Compared with traditional dc arc discharge with filament and RF discharge, the microwave driven source that has long lifetime and has no metallic contamination is regarded as a potential choice of PFG [1]. Attempt to develop a large scale PFG based on 2.45 GHz microwave driven sources was launched at Peking University (PKU). A prototype one is a miniaturized 2.45 GHz permanent magnet electron cyclotron resonance (ECR) source to produce point-like electron beam. In previous experiments, more than 8 mA electron beam has been extracted with a ’6 mm extraction hole at an input microwave power of 22 W with argon gas [2]. Recently, studies are focusing on the possibility of producing of ribbon electron beams as PFG with 2.45GHz microwave driven surface wave plasma (SWP) source. A cylindrical chamber surface wave plasma generator with a using cylindrical dielectric waveguide and a 70 mm×3 mm extraction slit was fabricated. The primary test results were obtained. More details of this PFGs will be discussed in this work.}},
}