SRF2021 - List of Authors (Sayeed, Md.N.)

Paper	Title	Page
THPTEV015	Cylindrical Magnetron Development for Nb3sn Deposition via Magnetron Sputtering	868
	Md.N. Sayeed, H. Elsayed-Ali ODU, Norfolk, Virginia, USA C. Côté, M.A. Farzad, A. Sarkissian PLASMIONIQUE Inc., Varennes, Québec, Canada G.V. Eremeev Fermilab, Batavia, Illinois, USA A-M. Valente-Feliciano JLab, Newport News, Virginia, USA
	Funding: This work was supported by the U.S. Department of Energy, Office of Science, Office of Nuclear Physics under Contract No. DE-AC05-06OR23177. Due to its better superconducting properties (critical temperature Tc~ 18.3 K, superheating field Hsh~ 400 mT), Nb₃Sn is considered as a potential alternative to niobium (Tc~ 9.25 K, Hsh~ 200 mT) for superconducting radiofrequency (SRF) cavities for particle acceleration. Magnetron sputtering is an effective method to produce superconducting Nb₃Sn films. We deposited superconducting Nb₃Sn films on samples with magnetron sputtering using co-sputtering, sequential sputtering, and sputtering from a stoichiometric target. Nb₃Sn films produced by magnetron sputtering in our previous experiments have achieved DC superconducting critical temperature up to 17.93 K and RF superconducting transition at 17.2 K. A magnetron sputtering system with two identical cylindrical cathodes that can be used to sputter Nb₃Sn films on cavities has been designed and is under development now. We report on the design and the current progress on the development of the system.
	Poster THPTEV015 [1.131 MB]
DOI •	reference for this paper ※ doi:10.18429/JACoW-SRF2021-THPTEV015
About •	Received ※ 22 June 2021 — Revised ※ 12 August 2021 — Accepted ※ 21 August 2021 — Issue date ※ 27 September 2021
Cite •	reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)

Paper

Title

Page

Cylindrical Magnetron Development for Nb3sn Deposition via Magnetron Sputtering

868

Md.N. Sayeed, H. Elsayed-Ali
ODU, Norfolk, Virginia, USA
C. Côté, M.A. Farzad, A. Sarkissian
PLASMIONIQUE Inc., Varennes, Québec, Canada
G.V. Eremeev
Fermilab, Batavia, Illinois, USA
A-M. Valente-Feliciano
JLab, Newport News, Virginia, USA

Funding: This work was supported by the U.S. Department of Energy, Office of Science, Office of Nuclear Physics under Contract No. DE-AC05-06OR23177.
Due to its better superconducting properties (critical temperature Tc~ 18.3 K, superheating field Hsh~ 400 mT), Nb₃Sn is considered as a potential alternative to niobium (Tc~ 9.25 K, Hsh~ 200 mT) for superconducting radiofrequency (SRF) cavities for particle acceleration. Magnetron sputtering is an effective method to produce superconducting Nb₃Sn films. We deposited superconducting Nb₃Sn films on samples with magnetron sputtering using co-sputtering, sequential sputtering, and sputtering from a stoichiometric target. Nb₃Sn films produced by magnetron sputtering in our previous experiments have achieved DC superconducting critical temperature up to 17.93 K and RF superconducting transition at 17.2 K. A magnetron sputtering system with two identical cylindrical cathodes that can be used to sputter Nb₃Sn films on cavities has been designed and is under development now. We report on the design and the current progress on the development of the system.

Poster THPTEV015 [1.131 MB]

DOI •

reference for this paper ※ doi:10.18429/JACoW-SRF2021-THPTEV015

About •

Received ※ 22 June 2021 — Revised ※ 12 August 2021 — Accepted ※ 21 August 2021 — Issue date ※ 27 September 2021

Cite •

reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)