JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
TY - CONF AU - Sayeed, Md.N. AU - Côté, C. AU - Elsayed-Ali, H. AU - Eremeev, G.V. AU - Farzad, M.A. AU - Sarkissian, A. AU - Valente-Feliciano, A-M. ED - Saito, Kenji ED - Xu, Ting ED - Sakamoto, Naruhiko ED - Lesage, Ana ED - Schaa, Volker R.W. TI - Cylindrical Magnetron Development for Nb3sn Deposition via Magnetron Sputtering J2 - Proc. of SRF2021, East Lansing, MI, USA, 28 June-02 July 2021 CY - East Lansing, MI, USA T2 - International Conference on RF Superconductivity T3 - 20 LA - english AB - Due to its better superconducting properties (critical temperature Tc~ 18.3 K, superheating field Hsh~ 400 mT), Nb₃Sn is considered as a potential alternative to niobium (Tc~ 9.25 K, Hsh~ 200 mT) for superconducting radiofrequency (SRF) cavities for particle acceleration. Magnetron sputtering is an effective method to produce superconducting Nb₃Sn films. We deposited superconducting Nb₃Sn films on samples with magnetron sputtering using co-sputtering, sequential sputtering, and sputtering from a stoichiometric target. Nb₃Sn films produced by magnetron sputtering in our previous experiments have achieved DC superconducting critical temperature up to 17.93 K and RF superconducting transition at 17.2 K. A magnetron sputtering system with two identical cylindrical cathodes that can be used to sputter Nb₃Sn films on cavities has been designed and is under development now. We report on the design and the current progress on the development of the system. PB - JACoW Publishing CP - Geneva, Switzerland SP - 868 EP - 870 KW - cavity KW - SRF KW - target KW - site KW - radio-frequency DA - 2022/10 PY - 2022 SN - 2673-5504 SN - 978-3-95450-233-2 DO - doi:10.18429/JACoW-SRF2021-THPTEV015 UR - https://jacow.org/srf2021/papers/thptev015.pdf ER -