JACoW logo

Journals of Accelerator Conferences Website (JACoW)

JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.


BiBTeX citation export for THPTEV015: Cylindrical Magnetron Development for Nb3sn Deposition via Magnetron Sputtering

@inproceedings{sayeed:srf2021-thptev015,
  author       = {Md.N. Sayeed and C. Côté and H. Elsayed-Ali and G.V. Eremeev and M.A. Farzad and A. Sarkissian and A-M. Valente-Feliciano},
% author       = {Md.N. Sayeed and C. Côté and H. Elsayed-Ali and G.V. Eremeev and M.A. Farzad and A. Sarkissian and others},
% author       = {Md.N. Sayeed and others},
  title        = {{Cylindrical Magnetron Development for Nb3sn Deposition via Magnetron Sputtering}},
  booktitle    = {Proc. SRF'21},
% booktitle    = {Proc. 20th International Conference on RF Superconductivity (SRF'21)},
  pages        = {868--870},
  eid          = {THPTEV015},
  language     = {english},
  keywords     = {cavity, SRF, target, site, radio-frequency},
  venue        = {East Lansing, MI, USA},
  series       = {International Conference on RF Superconductivity},
  number       = {20},
  publisher    = {JACoW Publishing, Geneva, Switzerland},
  month        = {10},
  year         = {2022},
  issn         = {2673-5504},
  isbn         = {978-3-95450-233-2},
  doi          = {10.18429/JACoW-SRF2021-THPTEV015},
  url          = {https://jacow.org/srf2021/papers/thptev015.pdf},
  abstract     = {{Due to its better superconducting properties (critical temperature Tc~ 18.3 K, superheating field Hsh~ 400 mT), Nb₃Sn is considered as a potential alternative to niobium (Tc~ 9.25 K, Hsh~ 200 mT) for superconducting radiofrequency (SRF) cavities for particle acceleration. Magnetron sputtering is an effective method to produce superconducting Nb₃Sn films. We deposited superconducting Nb₃Sn films on samples with magnetron sputtering using co-sputtering, sequential sputtering, and sputtering from a stoichiometric target. Nb₃Sn films produced by magnetron sputtering in our previous experiments have achieved DC superconducting critical temperature up to 17.93 K and RF superconducting transition at 17.2 K. A magnetron sputtering system with two identical cylindrical cathodes that can be used to sputter Nb₃Sn films on cavities has been designed and is under development now. We report on the design and the current progress on the development of the system.}},
}