Author: Ma, W.J.
Paper Title Page
TUPYP029
 The Study on NEG Thin Film Coated by DC Magnetron Sputtering Based on COMSOL  
 
  • W.J. Ma
    USTC/NSRL, Hefei, Anhui, People’s Republic of China
  
  The NEG coated vac­uum cham­bers pro­vide an ef­fi­cient so­lu­tion to the ob­tain­ing of ul­tra-high vac­uum in the dif­frac­tion lim­ited stor­age ring (DSRL). Dur­ing the DC mag­netron sput­ter­ing process, the po­si­tion of the cath­ode tar­get will af­fect the qual­ity of the NEG film. In this work, the sim­u­la­tion of the state of the glow dis­charge plasma was per­formed by COM­SOL Mul­ti­physics. The dis­tri­b­u­tion of elec­tric po­ten­tial, argon ion num­ber den­sity and elec­tron den­sity dur­ing the dis­charge of the or­tho­cen­tric and ec­cen­tric tar­gets were sim­u­lated.  
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