| Paper | Title | Page |
|---|---|---|
TUPYP029 |
The Study on NEG Thin Film Coated by DC Magnetron Sputtering Based on COMSOL | |
|
||
| The NEG coated vacuum chambers provide an efficient solution to the obtaining of ultra-high vacuum in the diffraction limited storage ring (DSRL). During the DC magnetron sputtering process, the position of the cathode target will affect the quality of the NEG film. In this work, the simulation of the state of the glow discharge plasma was performed by COMSOL Multiphysics. The distribution of electric potential, argon ion number density and electron density during the discharge of the orthocentric and eccentric targets were simulated. | ||
| Cite • | reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml) | |