JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
@unpublished{ma:medsi2023-tupyp029,
author = {W.J. Ma},
title = {{The Study on NEG Thin Film Coated by DC Magnetron Sputtering Based on COMSOL}},
% booktitle = {Proc. MEDSI'23},
booktitle = {Proc. Int. Conf. Mech. Eng. Design Synchrotron Radiat. Equip. Instrum. (MEDSI'23)},
eventdate = {2023-11-06/2023-11-10},
language = {english},
intype = {presented at the},
series = {International Conference on Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation},
number = {12},
venue = {Beijing, China},
publisher = {JACoW Publishing, Geneva, Switzerland},
month = {07},
year = {2024},
note = {presented at MEDSI'23 in Beijing, China, unpublished},
abstract = {{The NEG coated vacuum chambers provide an efficient solution to the obtaining of ultra-high vacuum in the diffraction limited storage ring (DSRL). During the DC magnetron sputtering process, the position of the cathode target will affect the quality of the NEG film. In this work, the simulation of the state of the glow discharge plasma was performed by COMSOL Multiphysics. The distribution of electric potential, argon ion number density and electron density during the discharge of the orthocentric and eccentric targets were simulated.}},
}