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RIS citation export for TUPYP029: The Study on NEG Thin Film Coated by DC Magnetron Sputtering Based on COMSOL

TY  - UNPB
AU  - Ma, W.J.
ED  - Schaa, Volker R.W.
ED  - Bian, Lin
ED  - Chen, Zhichu
ED  - Dong, Yuhui
ED  - He, Ping
TI  - The Study on NEG Thin Film Coated by DC Magnetron Sputtering Based on COMSOL
J2  - Proc. of MEDSI2023, Beijing, China, 06-10 November 2023
CY  - Beijing, China
T2  - International Conference on Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation
T3  - 12
LA  - english
AB  - The NEG coated vacuum chambers provide an efficient solution to the obtaining of ultra-high vacuum in the diffraction limited storage ring (DSRL). During the DC magnetron sputtering process, the position of the cathode target will affect the quality of the NEG film. In this work, the simulation of the state of the glow discharge plasma was performed by COMSOL Multiphysics. The distribution of electric potential, argon ion number density and electron density during the discharge of the orthocentric and eccentric targets were simulated.
PB  - JACoW Publishing
CP  - Geneva, Switzerland
ER  -