Author: Shchelkanov, I.A.
Paper Title Page
WEPAB390 High-Quality, Conformal Bellows Coatings Using Ultra-Fast HiPIMS with Precision Ion Energy Control 3626
 
  • T.J. Houlahan, I. Haehnlein, W.M. Huber, B.E. Jurczyk, I.A. Shchelkanov, R.A. Stubbers
    Starfire Industries LLC, Champaign, USA
  
  Funding: This material is based upon work supported by the U.S. Department of Energy under Award Number DE-SC0020481.
In this paper we demon­strate a re­place­ment for tra­di­tional ’wet’ chem­i­cal de­po­si­tion processes using a vac­uum, ion­ized phys­i­cal vapor de­po­si­tion (iPVD) process that re­sults in a con­for­mal metal film, ca­pa­ble of coat­ing com­plex, con­vo­luted parts that are com­mon in mod­ern par­ti­cle ac­cel­er­a­tors (e.g., bel­lows, RF cav­i­ties). Re­sults are pre­sented for a process uti­liz­ing the com­bined de­po­si­tion and etch­ing that are achieved using ul­tra-fast high-power im­pulse mag­netron sput­ter­ing (HiP­IMS) cou­pled with pre­ci­sion con­trol of the ion en­ergy using a pos­i­tive volt­age re­ver­sal. This process re­sults in a con­for­mal film and has been used to coat both test coupons and full bel­lows as­sem­blies. The re­sult­ing Cu films, which are 5-10 µm in thick­ness, ex­hibit ex­cel­lent ad­he­sion. Fur­ther, they have been shown to tol­er­ate tem­per­a­ture ex­tremes rang­ing from 77 K to a 400 C vac­uum bake­out as well as ex­treme plas­tic de­for­ma­tion of the sub­strate with­out any buck­ling, crack­ing, or de­lam­i­na­tion. 		 
DOI • reference for this paper ※ https://doi.org/10.18429/JACoW-IPAC2021-WEPAB390  
About • paper received ※ 19 May 2021       paper accepted ※ 02 July 2021       issue date ※ 31 August 2021  
Export • reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)