IPAC2021 - List of Authors (Shchelkanov, I.A.)

Paper	Title	Page
WEPAB390	High-Quality, Conformal Bellows Coatings Using Ultra-Fast HiPIMS with Precision Ion Energy Control	3626
	T.J. Houlahan, I. Haehnlein, W.M. Huber, B.E. Jurczyk, I.A. Shchelkanov, R.A. Stubbers Starfire Industries LLC, Champaign, USA
	Funding: This material is based upon work supported by the U.S. Department of Energy under Award Number DE-SC0020481. In this paper we demonstrate a replacement for traditional ’wet’ chemical deposition processes using a vacuum, ionized physical vapor deposition (iPVD) process that results in a conformal metal film, capable of coating complex, convoluted parts that are common in modern particle accelerators (e.g., bellows, RF cavities). Results are presented for a process utilizing the combined deposition and etching that are achieved using ultra-fast high-power impulse magnetron sputtering (HiPIMS) coupled with precision control of the ion energy using a positive voltage reversal. This process results in a conformal film and has been used to coat both test coupons and full bellows assemblies. The resulting Cu films, which are 5-10 µm in thickness, exhibit excellent adhesion. Further, they have been shown to tolerate temperature extremes ranging from 77 K to a 400 C vacuum bakeout as well as extreme plastic deformation of the substrate without any buckling, cracking, or delamination.
DOI •	reference for this paper ※ https://doi.org/10.18429/JACoW-IPAC2021-WEPAB390
About •	paper received ※ 19 May 2021 paper accepted ※ 02 July 2021 issue date ※ 31 August 2021
Export •	reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)

Paper

Title

Page

High-Quality, Conformal Bellows Coatings Using Ultra-Fast HiPIMS with Precision Ion Energy Control

3626

T.J. Houlahan, I. Haehnlein, W.M. Huber, B.E. Jurczyk, I.A. Shchelkanov, R.A. Stubbers
Starfire Industries LLC, Champaign, USA

Funding: This material is based upon work supported by the U.S. Department of Energy under Award Number DE-SC0020481.
In this paper we demonstrate a replacement for traditional ’wet’ chemical deposition processes using a vacuum, ionized physical vapor deposition (iPVD) process that results in a conformal metal film, capable of coating complex, convoluted parts that are common in modern particle accelerators (e.g., bellows, RF cavities). Results are presented for a process utilizing the combined deposition and etching that are achieved using ultra-fast high-power impulse magnetron sputtering (HiPIMS) coupled with precision control of the ion energy using a positive voltage reversal. This process results in a conformal film and has been used to coat both test coupons and full bellows assemblies. The resulting Cu films, which are 5-10 µm in thickness, exhibit excellent adhesion. Further, they have been shown to tolerate temperature extremes ranging from 77 K to a 400 C vacuum bakeout as well as extreme plastic deformation of the substrate without any buckling, cracking, or delamination.

DOI •

reference for this paper ※ https://doi.org/10.18429/JACoW-IPAC2021-WEPAB390

About •

paper received ※ 19 May 2021 paper accepted ※ 02 July 2021 issue date ※ 31 August 2021

Export •

reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)