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TY - CONF AU - Houlahan, T.J. AU - Haehnlein, I. AU - Huber, W.M. AU - Jurczyk, B.E. AU - Shchelkanov, I.A. AU - Stubbers, R.A. ED - Liu, Lin ED - Byrd, John M. ED - Neuenschwander, Regis T. ED - Picoreti, Renan ED - Schaa, Volker R. W. TI - High-Quality, Conformal Bellows Coatings Using Ultra-Fast HiPIMS with Precision Ion Energy Control J2 - Proc. of IPAC2021, Campinas, SP, Brazil, 24-28 May 2021 CY - Campinas, SP, Brazil T2 - International Particle Accelerator Conference T3 - 12 LA - english AB - In this paper we demonstrate a replacement for traditional ’wet’ chemical deposition processes using a vacuum, ionized physical vapor deposition (iPVD) process that results in a conformal metal film, capable of coating complex, convoluted parts that are common in modern particle accelerators (e.g., bellows, RF cavities). Results are presented for a process utilizing the combined deposition and etching that are achieved using ultra-fast high-power impulse magnetron sputtering (HiPIMS) coupled with precision control of the ion energy using a positive voltage reversal. This process results in a conformal film and has been used to coat both test coupons and full bellows assemblies. The resulting Cu films, which are 5-10 µm in thickness, exhibit excellent adhesion. Further, they have been shown to tolerate temperature extremes ranging from 77 K to a 400 C vacuum bakeout as well as extreme plastic deformation of the substrate without any buckling, cracking, or delamination. PB - JACoW Publishing CP - Geneva, Switzerland SP - 3626 EP - 3629 KW - plasma KW - vacuum KW - target KW - operation KW - experiment DA - 2021/08 PY - 2021 SN - 2673-5490 SN - 978-3-95450-214-1 DO - doi:10.18429/JACoW-IPAC2021-WEPAB390 UR - https://jacow.org/ipac2021/papers/wepab390.pdf ER -