Author: Jurczyk, B.E.
Paper Title Page
WEPAB390 High-Quality, Conformal Bellows Coatings Using Ultra-Fast HiPIMS with Precision Ion Energy Control 3626
 
  • T.J. Houlahan, I. Haehnlein, W.M. Huber, B.E. Jurczyk, I.A. Shchelkanov, R.A. Stubbers
    Starfire Industries LLC, Champaign, USA
 
  Funding: This material is based upon work supported by the U.S. Department of Energy under Award Number DE-SC0020481.
In this paper we demonstrate a replacement for traditional ’wet’ chemical deposition processes using a vacuum, ionized physical vapor deposition (iPVD) process that results in a conformal metal film, capable of coating complex, convoluted parts that are common in modern particle accelerators (e.g., bellows, RF cavities). Results are presented for a process utilizing the combined deposition and etching that are achieved using ultra-fast high-power impulse magnetron sputtering (HiPIMS) coupled with precision control of the ion energy using a positive voltage reversal. This process results in a conformal film and has been used to coat both test coupons and full bellows assemblies. The resulting Cu films, which are 5-10 µm in thickness, exhibit excellent adhesion. Further, they have been shown to tolerate temperature extremes ranging from 77 K to a 400 C vacuum bakeout as well as extreme plastic deformation of the substrate without any buckling, cracking, or delamination.
 
DOI • reference for this paper ※ https://doi.org/10.18429/JACoW-IPAC2021-WEPAB390  
About • paper received ※ 19 May 2021       paper accepted ※ 02 July 2021       issue date ※ 31 August 2021  
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