ECRIS2020 - Classification: 08: Industrial Application of New Technologies

Paper	Title	Page
WEWZO02	Precise Identification of Extracted Ion Beam Spectrum Initially Obtained in Synthesising Iron-Endohedral Fullerenes on ECRIS	114
	I. Owada, S. Harisaki, Y. Kato, W. Kubo, T. Omori, K. Sato, K. Tsuda Osaka University, Graduate School of Engineering, Osaka, Japan A. Kitagawa, M. Muramatsu QST-NIRS, Chiba, Japan Y. Yoshida Toyo University, Kawagoe-shi, Saitama, Japan
	Electron cyclotron resonance ion source (ECRIS) plasma has been constructed for producing synthesized ion beams in Osaka Univ.[1,2] We hope that it can become a universal source capable of producing ions with wide range mass/charge ration (m/q). We have been trying to produce endohedral fullerenes in the ECRIS. We have conducted initial experiments on production of them only in the second stage of ECRIS. We have been using iron vapor source by induction heating (IH) from the mirror end along to the geometrical axis, and C60 crucible from the side wall, respectively. We succeeded in realizing ECR plasma that fullerene and iron ions coexist on the single stage ECRIS, even by 1kV extraction voltage.[3] By these experimental series, the typical CSD suggests that there is possibility of slight formation of iron fullerenes compounds and iron endohedral fullerenes. We are continuing to investigate the experimental conditions that maximize spectrum corresponding to iron endohedral fullerenes. In this paper we describe preliminary experimental results of synthesizing iron-endohedral fullerene on the ECRIS. Y. Kato, et al., RSI, 2014, 85, 02A950-1-3. Y. Kato, et al., RSI, 2016, 87, 02A710-1-4. **Y. Kato, et.al., IIT2018, IEEE Conf. Publ., 2019, pp.172-175.
	Slides WEWZO02 [1.932 MB]
DOI •	reference for this paper ※ https://doi.org/10.18429/JACoW-ECRIS2020-WEWZO02
About •	Received ※ 25 September 2020 — Revised ※ 14 October 2020 — Accepted ※ 03 November 2020 — Issue date ※ 12 January 2022
Cite •	reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)

WEXZO02	³⁹Ar Enrichment System Based on a 2.45 GHz ECR Ion Source	128
	Z.H. Jia, X. Fang, Y.H. Guo, Q. Hu, Y.J. Li, Y.G. Liu, L.T. Sun, Q. Wu, Y. Yang, T.X. Zhan, J.Q. Zhang IMP/CAS, Lanzhou, People’s Republic of China W. Jiang HNLPSM, Hefei, People’s Republic of China Z.T. Lu USTC, SNST, Anhui, People’s Republic of China
	Funding: National Key Research and Development Project (contract No.2016YFA0302202). Aimed at improving the ATTA’s (Atom Trap Trace Analysis) dating efficiency with ³⁹Ar radioactive isotope, an isotope enrichment system has been developed at IMP (Institute of Modern Physics) to increase the abundance of ³⁹Ar in the incident sample gas. In this enrichment system, a 2.45 GHz ECR ion source was designed to ionize sample gas and produce isotopes beams with several mA, and the isotopes beam is transported and separated in the separation beam line, which is consisted of two quadrupoles and an analysis magnet. The separated isotopes are collected by a rotated aluminum foil target. According to the recent cross-checked results with ATTA, high enrichment factor of ³⁹Ar isotope has been successfully reached. This paper will give a general introduction to the platform setup. The isotope enrichment efficiency is the critical issue for such a platform and will be specially discussed.
	Slides WEXZO02 [1.799 MB]
DOI •	reference for this paper ※ https://doi.org/10.18429/JACoW-ECRIS2020-WEXZO02
About •	Received ※ 29 September 2020 — Revised ※ 21 December 2020 — Accepted ※ 14 February 2021 — Issue date ※ 21 July 2021
Cite •	reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)

WEYZO01	Present Status of HIMAC ECR Ion Sources	140
	M. Muramatsu, A. Kitagawa QST-NIRS, Chiba, Japan S. Hashizaki, T. Kondo, F. Ouchi, T. Sasano, T. Shiraishi, T. Suzuki, K. Takahashi AEC, Chiba, Japan Y. Iwata NIRS, Chiba-shi, Japan M. Kawashima Gunma University, Heavy-Ion Medical Research Center, Maebashi-Gunma, Japan M. Sei R&K Company Limited., Shizuoka, Japan
	High-energy carbon-ion radiotherapy is being carried out at Heavy Ion Medical Accelerator in Chiba (HIMAC). Over 12000 cancer patients have been treated with carbon beams having energies of between 56-430 MeV/u since 1994. There are two injectors in the HIMAC for medical and experimental use. First injector consists of two ECR ion sources and one PIG ion source, the RFQ linac and the DTL. Usually, this injector suppling the carbon ion for cancer therapy and various ion such as H, He, Fe, Xe are accelerated for biological and physical experiment. The 10 GHz NIRS-ECR ion source produce the carbon ion for cancer therapy. The 18 GHz NIRS-HEC ion source produce He to Xe ions for experimental use. Second injector consists of the compact ECR ion source with all permanent magnet, the RFQ linac and the APF IH-DTL. This injector supplies the carbon ion for experimental use. Additionally, we tried production of the Indium and the Tin ions by using the In(C5H5) and the Sn(i-C3H7)4 at the NIRS-HEC. Beam current of the 115In²⁰⁺ and 120Sn¹⁸⁺ were 90 and 15μA, respectively. Present status of ECR ion sources and some development will be described.
	Slides WEYZO01 [3.722 MB]
DOI •	reference for this paper ※ https://doi.org/10.18429/JACoW-ECRIS2020-WEYZO01
About •	Received ※ 29 September 2020 — Revised ※ 01 October 2020 — Accepted ※ 15 October 2020 — Issue date ※ 16 October 2021
Cite •	reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)

WEYZO02	Design of a 2.45 GHz Surface Wave Plasma Source for Plasma Flood Gun	143
	S.X. Peng, J.E. Chen, B.J. Cui, Z.Y. Guo, Y.X. Jiang, K. Li, T.H. Ma, J.M. Wen, W.B. Wu, Y. Xu, A.L. Zhang, J.F. Zhang, T. Zhang PKU, Beijing, People’s Republic of China
	Plasma ’ood guns (PFGs) are widely used to neutralize wafer charge during the doping process in modern ion implanters. Compared with traditional dc arc discharge with filament and RF discharge, the microwave driven source that has long lifetime and has no metallic contamination is regarded as a potential choice of PFG [1]. Attempt to develop a large scale PFG based on 2.45 GHz microwave driven sources was launched at Peking University (PKU). A prototype one is a miniaturized 2.45 GHz permanent magnet electron cyclotron resonance (ECR) source to produce point-like electron beam. In previous experiments, more than 8 mA electron beam has been extracted with a ’6 mm extraction hole at an input microwave power of 22 W with argon gas [2]. Recently, studies are focusing on the possibility of producing of ribbon electron beams as PFG with 2.45GHz microwave driven surface wave plasma (SWP) source. A cylindrical chamber surface wave plasma generator with a using cylindrical dielectric waveguide and a 70 mm×3 mm extraction slit was fabricated. The primary test results were obtained. More details of this PFGs will be discussed in this work. References [1] B. Vanderberg, et al. AIP Conference Proceedings, 1496(1), 356 (2012). [2] Yaoxiang Jiang, Shixiang Peng, et al, Review of Scientific Instruments, 91, 033319 (2020).
	Slides WEYZO02 [5.475 MB]
DOI •	reference for this paper ※ https://doi.org/10.18429/JACoW-ECRIS2020-WEYZO02
About •	Received ※ 28 September 2020 — Revised ※ 29 December 2020 — Accepted ※ 25 April 2022 — Issue date ※ 14 July 2022
Cite •	reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)

Paper

Title

Page

Precise Identification of Extracted Ion Beam Spectrum Initially Obtained in Synthesising Iron-Endohedral Fullerenes on ECRIS

114

I. Owada, S. Harisaki, Y. Kato, W. Kubo, T. Omori, K. Sato, K. Tsuda
Osaka University, Graduate School of Engineering, Osaka, Japan
A. Kitagawa, M. Muramatsu
QST-NIRS, Chiba, Japan
Y. Yoshida
Toyo University, Kawagoe-shi, Saitama, Japan

Electron cyclotron resonance ion source (ECRIS) plasma has been constructed for producing synthesized ion beams in Osaka Univ.[1,2] We hope that it can become a universal source capable of producing ions with wide range mass/charge ration (m/q). We have been trying to produce endohedral fullerenes in the ECRIS. We have conducted initial experiments on production of them only in the second stage of ECRIS. We have been using iron vapor source by induction heating (IH) from the mirror end along to the geometrical axis, and C60 crucible from the side wall, respectively. We succeeded in realizing ECR plasma that fullerene and iron ions coexist on the single stage ECRIS, even by 1kV extraction voltage.[3] By these experimental series, the typical CSD suggests that there is possibility of slight formation of iron fullerenes compounds and iron endohedral fullerenes. We are continuing to investigate the experimental conditions that maximize spectrum corresponding to iron endohedral fullerenes. In this paper we describe preliminary experimental results of synthesizing iron-endohedral fullerene on the ECRIS.
*Y. Kato, et al., RSI, 2014, 85, 02A950-1-3.
**Y. Kato, et al., RSI, 2016, 87, 02A710-1-4.
***Y. Kato, et.al., IIT2018, IEEE Conf. Publ., 2019, pp.172-175.

Slides WEWZO02 [1.932 MB]

DOI •

reference for this paper ※ https://doi.org/10.18429/JACoW-ECRIS2020-WEWZO02

About •

Received ※ 25 September 2020 — Revised ※ 14 October 2020 — Accepted ※ 03 November 2020 — Issue date ※ 12 January 2022

Cite •

reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)

WEXZO02

³⁹Ar Enrichment System Based on a 2.45 GHz ECR Ion Source

128

Z.H. Jia, X. Fang, Y.H. Guo, Q. Hu, Y.J. Li, Y.G. Liu, L.T. Sun, Q. Wu, Y. Yang, T.X. Zhan, J.Q. Zhang
IMP/CAS, Lanzhou, People’s Republic of China
W. Jiang
HNLPSM, Hefei, People’s Republic of China
Z.T. Lu
USTC, SNST, Anhui, People’s Republic of China

Funding: National Key Research and Development Project (contract No.2016YFA0302202).
Aimed at improving the ATTA’s (Atom Trap Trace Analysis) dating efficiency with ³⁹Ar radioactive isotope, an isotope enrichment system has been developed at IMP (Institute of Modern Physics) to increase the abundance of ³⁹Ar in the incident sample gas. In this enrichment system, a 2.45 GHz ECR ion source was designed to ionize sample gas and produce isotopes beams with several mA, and the isotopes beam is transported and separated in the separation beam line, which is consisted of two quadrupoles and an analysis magnet. The separated isotopes are collected by a rotated aluminum foil target. According to the recent cross-checked results with ATTA, high enrichment factor of ³⁹Ar isotope has been successfully reached. This paper will give a general introduction to the platform setup. The isotope enrichment efficiency is the critical issue for such a platform and will be specially discussed.

Slides WEXZO02 [1.799 MB]

DOI •

reference for this paper ※ https://doi.org/10.18429/JACoW-ECRIS2020-WEXZO02

About •

Received ※ 29 September 2020 — Revised ※ 21 December 2020 — Accepted ※ 14 February 2021 — Issue date ※ 21 July 2021

Cite •

reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)

WEYZO01

Present Status of HIMAC ECR Ion Sources

140

M. Muramatsu, A. Kitagawa
QST-NIRS, Chiba, Japan
S. Hashizaki, T. Kondo, F. Ouchi, T. Sasano, T. Shiraishi, T. Suzuki, K. Takahashi
AEC, Chiba, Japan
Y. Iwata
NIRS, Chiba-shi, Japan
M. Kawashima
Gunma University, Heavy-Ion Medical Research Center, Maebashi-Gunma, Japan
M. Sei
R&K Company Limited., Shizuoka, Japan

High-energy carbon-ion radiotherapy is being carried out at Heavy Ion Medical Accelerator in Chiba (HIMAC). Over 12000 cancer patients have been treated with carbon beams having energies of between 56-430 MeV/u since 1994. There are two injectors in the HIMAC for medical and experimental use. First injector consists of two ECR ion sources and one PIG ion source, the RFQ linac and the DTL. Usually, this injector suppling the carbon ion for cancer therapy and various ion such as H, He, Fe, Xe are accelerated for biological and physical experiment. The 10 GHz NIRS-ECR ion source produce the carbon ion for cancer therapy. The 18 GHz NIRS-HEC ion source produce He to Xe ions for experimental use. Second injector consists of the compact ECR ion source with all permanent magnet, the RFQ linac and the APF IH-DTL. This injector supplies the carbon ion for experimental use. Additionally, we tried production of the Indium and the Tin ions by using the In(C5H5) and the Sn(i-C3H7)4 at the NIRS-HEC. Beam current of the 115In²⁰⁺ and 120Sn¹⁸⁺ were 90 and 15μA, respectively. Present status of ECR ion sources and some development will be described.

Slides WEYZO01 [3.722 MB]

DOI •

reference for this paper ※ https://doi.org/10.18429/JACoW-ECRIS2020-WEYZO01

About •

Received ※ 29 September 2020 — Revised ※ 01 October 2020 — Accepted ※ 15 October 2020 — Issue date ※ 16 October 2021

Cite •

reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)

WEYZO02

Design of a 2.45 GHz Surface Wave Plasma Source for Plasma Flood Gun

143

S.X. Peng, J.E. Chen, B.J. Cui, Z.Y. Guo, Y.X. Jiang, K. Li, T.H. Ma, J.M. Wen, W.B. Wu, Y. Xu, A.L. Zhang, J.F. Zhang, T. Zhang
PKU, Beijing, People’s Republic of China

Plasma ’ood guns (PFGs) are widely used to neutralize wafer charge during the doping process in modern ion implanters. Compared with traditional dc arc discharge with filament and RF discharge, the microwave driven source that has long lifetime and has no metallic contamination is regarded as a potential choice of PFG [1]. Attempt to develop a large scale PFG based on 2.45 GHz microwave driven sources was launched at Peking University (PKU). A prototype one is a miniaturized 2.45 GHz permanent magnet electron cyclotron resonance (ECR) source to produce point-like electron beam. In previous experiments, more than 8 mA electron beam has been extracted with a ’6 mm extraction hole at an input microwave power of 22 W with argon gas [2]. Recently, studies are focusing on the possibility of producing of ribbon electron beams as PFG with 2.45GHz microwave driven surface wave plasma (SWP) source. A cylindrical chamber surface wave plasma generator with a using cylindrical dielectric waveguide and a 70 mm×3 mm extraction slit was fabricated. The primary test results were obtained. More details of this PFGs will be discussed in this work.
References
[1] B. Vanderberg, et al. AIP Conference Proceedings, 1496(1), 356 (2012).
[2] Yaoxiang Jiang, Shixiang Peng, et al, Review of Scientific Instruments, 91, 033319 (2020).

Slides WEYZO02 [5.475 MB]

DOI •

reference for this paper ※ https://doi.org/10.18429/JACoW-ECRIS2020-WEYZO02

About •

Received ※ 28 September 2020 — Revised ※ 29 December 2020 — Accepted ※ 25 April 2022 — Issue date ※ 14 July 2022

Cite •

reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)