SRF2015 - List of Authors (Stenning, G.B.G.)

Paper	Title	Page
TUPB038	Superconducting Coatings Synthetized by CVD/PECVD for SRF Cavities	643
	P. Pizzol, P. Chalker, T. Heil The University of Liverpool, Liverpool, United Kingdom A.N. Hannah, O.B. Malyshev, S.M. Pattalwar, R. Valizadeh STFC/DL/ASTeC, Daresbury, Warrington, Cheshire, United Kingdom G.B.G. Stenning STFC/RAL/ISIS, Chilton, Didcot, Oxon, United Kingdom
	Finding a way to overcome the acceleration gradient limits that bulk niobium cavities can provide is a major challenge, fundamental to allow the accelerator science field to progress. In order to overcome the accelerating gradient limits of bulk niobium and reduce manufacturing and operation costs, the idea of using thin layers of niobium deposited on a copper cavity is being explored. This approach has lower material cost with higher availability and more importantly higher thermal conductivity. Physical vapour deposition (PVD) method is currently the preferred method to coat superconducting cavities, but its lack of conformity renders complicated shapes such as crab cavities very difficult to coat. By using chemical vapour deposition (CVD) and plasma enhanced chemical vapour deposition (PECVD) it is possible to deposit thin Nb layers uniformly with density very close to bulk material. This project explores the use of PECVD / CVD techniques to deposit metallic niobium on copper using NbCl5 as precursor and hydrogen as a coreagent. The samples obtained were then characterized via SEM, XRD, and EDX as well as assessing their superconductivity characteristics (RRR and Tc)
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TUPB040	High Power Impulse Magnetron Sputtering of Thin Films for Superconducting RF Cavities	647
	S. Wilde, B. Chesca Loughborough University, Loughborough, Leicestershire, United Kingdom E. Alves Associação EURATOM/IST, Instituto de Plasmas e Fusão Nuclear, Lisboa, Portugal N.P. Barradas Universidade de Lisboa, Instituto Superior Técnico, Bobadela, Portugal A.N. Hannah, O.B. Malyshev, S.M. Pattalwar, R. Valizadeh STFC/DL/ASTeC, Daresbury, Warrington, Cheshire, United Kingdom G.B.G. Stenning STFC/RAL/ISIS, Chilton, Didcot, Oxon, United Kingdom
	The production of superconducting coatings for radio frequency cavities is a rapidly developing field that should ultimately lead to acceleration gradients greater than those obtained by bulk Nb RF cavities. Optimizing superconducting properties of Nb and Nb compound thin-films is therefore essential. Nb films were deposited by magnetron sputtering in pulsed DC mode onto Si (100) and MgO (100) substrates and also by high impulse magnetron sputtering (HiPIMS) onto Si (100), MgO (100) and polycrystalline Cu. HiPIMS was then used to deposit NbN and NbTiN thin films onto Si(100) and polycrystalline Cu. The films were characterised using scanning electron microscopy, x-ray diffraction, DC SQUID magnetometry and Q factor for a flat thin film sample.
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Paper

Title

Page

Superconducting Coatings Synthetized by CVD/PECVD for SRF Cavities

643

P. Pizzol, P. Chalker, T. Heil
The University of Liverpool, Liverpool, United Kingdom
A.N. Hannah, O.B. Malyshev, S.M. Pattalwar, R. Valizadeh
STFC/DL/ASTeC, Daresbury, Warrington, Cheshire, United Kingdom
G.B.G. Stenning
STFC/RAL/ISIS, Chilton, Didcot, Oxon, United Kingdom

Finding a way to overcome the acceleration gradient limits that bulk niobium cavities can provide is a major challenge, fundamental to allow the accelerator science field to progress. In order to overcome the accelerating gradient limits of bulk niobium and reduce manufacturing and operation costs, the idea of using thin layers of niobium deposited on a copper cavity is being explored. This approach has lower material cost with higher availability and more importantly higher thermal conductivity. Physical vapour deposition (PVD) method is currently the preferred method to coat superconducting cavities, but its lack of conformity renders complicated shapes such as crab cavities very difficult to coat. By using chemical vapour deposition (CVD) and plasma enhanced chemical vapour deposition (PECVD) it is possible to deposit thin Nb layers uniformly with density very close to bulk material. This project explores the use of PECVD / CVD techniques to deposit metallic niobium on copper using NbCl5 as precursor and hydrogen as a coreagent. The samples obtained were then characterized via SEM, XRD, and EDX as well as assessing their superconductivity characteristics (RRR and Tc)

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TUPB040

High Power Impulse Magnetron Sputtering of Thin Films for Superconducting RF Cavities

647

S. Wilde, B. Chesca
Loughborough University, Loughborough, Leicestershire, United Kingdom
E. Alves
Associação EURATOM/IST, Instituto de Plasmas e Fusão Nuclear, Lisboa, Portugal
N.P. Barradas
Universidade de Lisboa, Instituto Superior Técnico, Bobadela, Portugal
A.N. Hannah, O.B. Malyshev, S.M. Pattalwar, R. Valizadeh
STFC/DL/ASTeC, Daresbury, Warrington, Cheshire, United Kingdom
G.B.G. Stenning
STFC/RAL/ISIS, Chilton, Didcot, Oxon, United Kingdom

The production of superconducting coatings for radio frequency cavities is a rapidly developing field that should ultimately lead to acceleration gradients greater than those obtained by bulk Nb RF cavities. Optimizing superconducting properties of Nb and Nb compound thin-films is therefore essential. Nb films were deposited by magnetron sputtering in pulsed DC mode onto Si (100) and MgO (100) substrates and also by high impulse magnetron sputtering (HiPIMS) onto Si (100), MgO (100) and polycrystalline Cu. HiPIMS was then used to deposit NbN and NbTiN thin films onto Si(100) and polycrystalline Cu. The films were characterised using scanning electron microscopy, x-ray diffraction, DC SQUID magnetometry and Q factor for a flat thin film sample.

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reference for this paper to ※ BibTeX, ※ LaTeX, ※ Text, ※ RIS/RefMan, ※ EndNote (xml)