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TY - CPAPER AU - Pizzol, P. AU - Chalker, P. AU - Hannah, A.N. AU - Heil, T. AU - Malyshev, O.B. AU - Pattalwar, S.M. AU - Stenning, G.B.G. AU - Valizadeh, R. TI - Superconducting Coatings Synthetized by CVD/PECVD for SRF Cavities J2 - Proc. of International Conference on RF Superconductivity (SRF2015), Whistler, BC, Canada, Sept. 13-18, 2015 AB - Finding a way to overcome the acceleration gradient limits that bulk niobium cavities can provide is a major challenge, fundamental to allow the accelerator science field to progress. In order to overcome the accelerating gradient limits of bulk niobium and reduce manufacturing and operation costs, the idea of using thin layers of niobium deposited on a copper cavity is being explored. This approach has lower material cost with higher availability and more importantly higher thermal conductivity. Physical vapour deposition (PVD) method is currently the preferred method to coat superconducting cavities, but its lack of conformity renders complicated shapes such as crab cavities very difficult to coat. By using chemical vapour deposition (CVD) and plasma enhanced chemical vapour deposition (PECVD) it is possible to deposit thin Nb layers uniformly with density very close to bulk material. This project explores the use of PECVD / CVD techniques to deposit metallic niobium on copper using NbCl5 as precursor and hydrogen as a coreagent. The samples obtained were then characterized via SEM, XRD, and EDX as well as assessing their superconductivity characteristics (RRR and Tc) PB - JACoW CY - Geneva, Switzerland SP - 643 EP - 646 KW - niobium KW - SRF KW - plasma KW - superconductivity KW - accelerating-gradient DA - 2015/12 PY - 2015 SN - 978-3-95450-178-6 DO - 10.18429/JACoW-SRF2015-TUPB038 UR - http://srf2015.vrws.de/papers/tupb038.pdf ER -