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TY - CPAPER AU - Wilde, S. AU - Alves, E. AU - Barradas, N.P. AU - Chesca, B. AU - Hannah, A.N. AU - Malyshev, O.B. AU - Pattalwar, S.M. AU - Stenning, G.B.G. AU - Valizadeh, R. TI - High Power Impulse Magnetron Sputtering of Thin Films for Superconducting RF Cavities J2 - Proc. of International Conference on RF Superconductivity (SRF2015), Whistler, BC, Canada, Sept. 13-18, 2015 AB - The production of superconducting coatings for radio frequency cavities is a rapidly developing field that should ultimately lead to acceleration gradients greater than those obtained by bulk Nb RF cavities. Optimizing superconducting properties of Nb and Nb compound thin-films is therefore essential. Nb films were deposited by magnetron sputtering in pulsed DC mode onto Si (100) and MgO (100) substrates and also by high impulse magnetron sputtering (HiPIMS) onto Si (100), MgO (100) and polycrystalline Cu. HiPIMS was then used to deposit NbN and NbTiN thin films onto Si(100) and polycrystalline Cu. The films were characterised using scanning electron microscopy, x-ray diffraction, DC SQUID magnetometry and Q factor for a flat thin film sample. PB - JACoW CY - Geneva, Switzerland SP - 647 EP - 650 KW - power-supply KW - target KW - radio-frequency KW - scattering KW - vacuum DA - 2015/12 PY - 2015 SN - 978-3-95450-178-6 DO - 10.18429/JACoW-SRF2015-TUPB040 UR - http://srf2015.vrws.de/papers/tupb040.pdf ER -