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| WEPMN028 |
Preliminary Mechanical Design of Ceramic Pipe Film Coating Equipment at Hefei Light Source II |
2988 |
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- J. Lu
NPU, Xi'an Shaanxi, People's Republic of China
- L. Fan, Y.Z. Hong, X.T. Pei, J. Wang, Y. Wang, W. Wei, Y.H. Xu, B. Zhang
USTC/NSRL, Hefei, Anhui, People's Republic of China
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Ceramic vacuum chambers are important components of the injection chamber at Hefei Light Source II (HLS II). The length of each Ceramic vacuum chamber is 350 mm and their inner surface is coated with TiN thin film whose properties are low secondary electron yield (SEY), good electrical conductivity, stability of performance, ability to block hydrogen permeation. Considering that the cross section of Ceramic pipe is racetrack structure, Ti plate was chose as the cathode to improve TiN thin film deposition rate. Meanwhile, the authors designed a motor drive magnetron sputtering film coating equipment to obtain uniform TiN film.
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| DOI • |
reference for this paper
※ https://doi.org/10.18429/JACoW-IPAC2015-WEPMN028
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