The Joint Accelerator Conferences Website (JACoW) is an international collaboration that publishes the proceedings of accelerator conferences held around the world.
TY - CONF AU - Lu, J. AU - Fan, L. AU - Hong, Y.Z. AU - Pei, X.T. AU - Wang, J. AU - Wang, Y. AU - Wei, W. AU - Xu, Y.H. AU - Zhang, B. ED - Henderson, Stuart ED - Akers, Evelyn ED - Satogata, Todd ED - Schaa, Volker R.W. TI - Preliminary Mechanical Design of Ceramic Pipe Film Coating Equipment at Hefei Light Source II J2 - Proc. of IPAC2015, Richmond, VA, USA, May 3-8, 2015 C1 - Richmond, VA, USA T2 - International Particle Accelerator Conference T3 - 6 LA - english AB - Ceramic vacuum chambers are important components of the injection chamber at Hefei Light Source II (HLS II). The length of each Ceramic vacuum chamber is 350 mm and their inner surface is coated with TiN thin film whose properties are low secondary electron yield (SEY), good electrical conductivity, stability of performance, ability to block hydrogen permeation. Considering that the cross section of Ceramic pipe is racetrack structure, Ti plate was chose as the cathode to improve TiN thin film deposition rate. Meanwhile, the authors designed a motor drive magnetron sputtering film coating equipment to obtain uniform TiN film. PB - JACoW CP - Geneva, Switzerland SP - 2988 EP - 2990 KW - cathode KW - vacuum KW - injection KW - simulation KW - experiment DA - 2015/06 PY - 2015 SN - 978-3-95450-168-7 DO - 10.18429/JACoW-IPAC2015-WEPMN028 UR - http://jacow.org/ipac2015/papers/wepmn028.pdf ER -