SRF2021 - List of Authors (Denny, P.)

Paper	Title	Page
MOPTEV014	New Improved Horizontal Electropolishing System for SRF Cavities	237
	C.E. Reece, S. Castagnola, P. Denny, A.L.A. Mitchell JLab, Newport News, Virginia, USA
	Funding: This manuscript has been authored by Jefferson Science Associates, LLC under U.S. DOE Contract No. DE-AC05-06OThR23177. The best performance of niobium SRF accelerating cavities is obtained with surfaces smoothed with electropolishing chemical finishing. Jefferson Lab has recently specified, procured, installed, and commissioned a new versatile production electropolishing (EP) tool. Experience with EP research and operations at JLab as well as vendor interactions and experience guided development of the system specification. Detailed design and fabrication was awarded by contract to Semiconductor Process Equipment Corporation (SPEC). The delivered system was integrated into the JLab chemroom infrastructure and commissioned in 2020. The new EP tool provides much improved heat exchange from the circulating H₂SO₄/HF electrolyte and also the cavity via variable temperature external cooling water flow, resulting in quite uniform cavity wall temperature control and thus improved removal uniformity. With the JLab infrastructure, stabilized process temperature as low as 5 C is available. We describe the system and illustrate operational modes in this contribution.
DOI •	reference for this paper ※ doi:10.18429/JACoW-SRF2021-MOPTEV014
About •	Received ※ 21 June 2021 — Revised ※ 08 July 2021 — Accepted ※ 19 August 2021 — Issue date ※ 31 March 2022
Cite •	reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)

Paper

Title

Page

New Improved Horizontal Electropolishing System for SRF Cavities

237

C.E. Reece, S. Castagnola, P. Denny, A.L.A. Mitchell
JLab, Newport News, Virginia, USA

Funding: This manuscript has been authored by Jefferson Science Associates, LLC under U.S. DOE Contract No. DE-AC05-06OThR23177.
The best performance of niobium SRF accelerating cavities is obtained with surfaces smoothed with electropolishing chemical finishing. Jefferson Lab has recently specified, procured, installed, and commissioned a new versatile production electropolishing (EP) tool. Experience with EP research and operations at JLab as well as vendor interactions and experience guided development of the system specification. Detailed design and fabrication was awarded by contract to Semiconductor Process Equipment Corporation (SPEC). The delivered system was integrated into the JLab chemroom infrastructure and commissioned in 2020. The new EP tool provides much improved heat exchange from the circulating H₂SO₄/HF electrolyte and also the cavity via variable temperature external cooling water flow, resulting in quite uniform cavity wall temperature control and thus improved removal uniformity. With the JLab infrastructure, stabilized process temperature as low as 5 C is available. We describe the system and illustrate operational modes in this contribution.

DOI •

reference for this paper ※ doi:10.18429/JACoW-SRF2021-MOPTEV014

About •

Received ※ 21 June 2021 — Revised ※ 08 July 2021 — Accepted ※ 19 August 2021 — Issue date ※ 31 March 2022

Cite •

reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)