Paper | Title | Page |
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TUP079 | Deposition of Nb3Sn Films by Multilayer Sequential Sputtering for SRF Cavity Application | 637 |
SUSP015 | use link to see paper's listing under its alternate paper code | |
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Nb3Sn is considered as an alternative of Nb for SRF accelerator cavity application due to its potential to obtain higher quality factors and higher accelerating gradients at a higher operating temperature. Magnetron sputtering is one of the effective techniques that can be used to fabricate Nb3Sn on SRF cavity surface. We report on the surface properties of Nb3Sn films fabricated by sputtering multiple layers of Nb and Sn on sapphire and niobium substrates followed by annealing at 950°C for 3 h. The crystal structure, film microstructure, composition and surface roughness were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDS), and atomic force microscopy (AFM). The RF performance of the Nb3Sn coated Nb substrates were measured by a surface impedance characterization system. We also report on the design of a multilayer sputter deposition system to coat a single-cell SRF cavity. | ||
DOI • | reference for this paper ※ https://doi.org/10.18429/JACoW-SRF2019-TUP079 | |
About • | paper received ※ 22 June 2019 paper accepted ※ 01 July 2019 issue date ※ 14 August 2019 | |
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THFUB2 | Progress with Nb Hipims Films on 1.3 GHz Cu Cavities | 823 |
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Funding: Authored by Jefferson Science Associates, LLC under U.S. DOE Contract No. DE-AC05-06OR23177. In recent years, efforts have been invested to leverage the different processes involved in energetic condensation to tailor Nb film growth in sequential steps. The resulting Nb/Cu films display high quality material properties and show promise of high RF performance. The lessons learned are now applied to 1.3 GHz Nb on Cu cavity deposition via high power impulse magnetron sputtering (HiPIMS). RF performance is measured at different temperatures. Particular attention is given to the effect of cooldown and sensitivity to external applied magnetic fields. The results are evaluated in light of the Nb film material and superconducting properties measured with various microscopy and magnetometry techniques in order to better understand the contributing factors to the residual and flux induced surface resistances. This contribution presents the insights gained in exploiting energetic condensation as a path towards RF Q-slope mitigation for Nb/Cu films, correlating film material characteristics with RF performance. |
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Slides THFUB2 [7.869 MB] | |
DOI • | reference for this paper ※ https://doi.org/10.18429/JACoW-SRF2019-THFUB2 | |
About • | paper received ※ 02 July 2019 paper accepted ※ 03 July 2019 issue date ※ 14 August 2019 | |
Export • | reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml) | |