Author: Beverstock, D.R.
Paper Title Page
THFUA3
 Material and Superconducting Properties of NbTiN/AlN Multilayer Films  
 
  • A-M. Valente-Feliciano, D.R. Beverstock, C.E. Reece
    JLab, Newport News, Virginia, USA
  • C.Z. Antoine
    CEA-DRF-IRFU, France
  • S. Keckert, O. Kugeler, D.B. Tikhonov
    HZB, Berlin, Germany
  • M.J. Kelley
    The College of William and Mary, Williamsburg, Virginia, USA
  • R. Valizadeh
    STFC/DL/ASTeC, Daresbury, Warrington, Cheshire, United Kingdom
  
  Funding: Authored by Jefferson Science Associates, LLC under U.S. DOE Contract No. DE-AC05-06OR23177 and DARPA-BAA MIPR No. HD0011728910
In the pursuit of increasing the range of surface magnetic fields sustainable in SRF cavities, new standards in quality of thin multi-layer superconductor/insulator/superconductor (SIS) structures are being achieved. With the synergistic development of multilayered metamaterials based on 3 to 1 nm NbTiN and AlN films, the interface between films is improved. Based on bulk film values, the maximum magnetic field contour plot is also established for NbTiN to guide the choice of each layer thickness and quickly converge to optimized SIS structures. The delayed DC flux entry is measured for standalone NbTiN films and multilayer stacked structures on ideal substrates and Nb substrates. Some SIS structures along with standalone NbTiN films have been deposited on Nb and their superconducting properties and RF surface impedance are evaluated. 		 
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