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TY - UNPB AU - Valente-Feliciano, A-M. AU - Antoine, C.Z. AU - Beverstock, D.R. AU - Keckert, S. AU - Kelley, M.J. AU - Kugeler, O. AU - Reece, C.E. AU - Tikhonov, D.B. AU - Valizadeh, R. ED - Michel, Peter ED - Arnold, André ED - Schaa, Volker RW TI - Material and Superconducting Properties of NbTiN/AlN Multilayer Films J2 - Proc. of SRF2019, Dresden, Germany, 30 June-05 July 2019 CY - Dresden, Germany T2 - International Conference on RF Superconductivity T3 - 19 LA - english AB - In the pursuit of increasing the range of surface magnetic fields sustainable in SRF cavities, new standards in quality of thin multi-layer superconductor/insulator/superconductor (SIS) structures are being achieved. With the synergistic development of multilayered metamaterials based on 3 to 1 nm NbTiN and AlN films, the interface between films is improved. Based on bulk film values, the maximum magnetic field contour plot is also established for NbTiN to guide the choice of each layer thickness and quickly converge to optimized SIS structures. The delayed DC flux entry is measured for standalone NbTiN films and multilayer stacked structures on ideal substrates and Nb substrates. Some SIS structures along with standalone NbTiN films have been deposited on Nb and their superconducting properties and RF surface impedance are evaluated. PB - JACoW Publishing CP - Geneva, Switzerland ER -