Author: Gou, F.
Paper Title Page
TUPB087 Low Temperature and Low Pressure Plasma for the HWR Superconducting Cavity In-situ Cleaning 595
 
  • A.D. Wu, W. Chang, H. Guo, Y. He, C.L. Li, Y.M. Li, P.R. Xiong, L. Yang, W.M. Yue, S.H. Zhang, H.W. Zhao
    IMP/CAS, Lanzhou, People's Republic of China
  • F. Gou
    Sichuan University, Chengdu, People's Republic of China
 
  The glow discharge for low temperature and low pressures plasma were utilized for the half-wave resonator (HWR) superconducting cavity in-situ cleaning. The plasma was on ignition of the Argon/Oxygen mixture atmosphere, which was under the low pressure of 0.5 to 5.0 Pascal. Driven by the RF power with the frequency of the cavity fundamental mode, the plasma showed the typical characteristic of the typical RF glow discharge, which the temperature of the electrons about 1eV that diagnosed by the optical emission spectrum. The experimental parameters for the discharge were optimized to obtain the uniform plasma distribution on the HWR cavity, including the RF power, the atmospheric pressure and the oxygen proportion. At last, the vertical cryogenic test was completed to investigate the impact of active oxygen plasma cleaning on the HWR cavity performance recovery, which contaminated by hydrocarbons. The test proves that the glow plasma clean can relieve the x-ray radiation which caused by the field electron emission effect.  
DOI • reference for this paper ※ https://doi.org/10.18429/JACoW-SRF2017-TUPB087  
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