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TY - CONF AU - Wu, A.D. AU - Chang, W. AU - Gou, F. AU - Guo, H. AU - He, Y. AU - Li, C.L. AU - Li, Y.M. AU - Xiong, P.R. AU - Yang, L. AU - Yue, W.M. AU - Zhang, S.H. AU - Zhao, H.W. ED - Schaa, Volker RW ED - He, Yuan ED - Li, Lu ED - Zhao, Ning TI - Low Temperature and Low Pressure Plasma for the HWR Superconducting Cavity In-situ Cleaning J2 - Proc. of SRF2017, Lanzhou, China, July 17-21, 2017 C1 - Lanzhou, China T2 - International Conference on RF Superconductivity T3 - 18 LA - english AB - The glow discharge for low temperature and low pressures plasma were utilized for the half-wave resonator (HWR) superconducting cavity in-situ cleaning. The plasma was on ignition of the Argon/Oxygen mixture atmosphere, which was under the low pressure of 0.5 to 5.0 Pascal. Driven by the RF power with the frequency of the cavity fundamental mode, the plasma showed the typical characteristic of the typical RF glow discharge, which the temperature of the electrons about 1eV that diagnosed by the optical emission spectrum. The experimental parameters for the discharge were optimized to obtain the uniform plasma distribution on the HWR cavity, including the RF power, the atmospheric pressure and the oxygen proportion. At last, the vertical cryogenic test was completed to investigate the impact of active oxygen plasma cleaning on the HWR cavity performance recovery, which contaminated by hydrocarbons. The test proves that the glow plasma clean can relieve the x-ray radiation which caused by the field electron emission effect. PB - JACoW CP - Geneva, Switzerland SP - 595 EP - 597 KW - ion KW - electron KW - plasma KW - cavity KW - experiment DA - 2018/01 PY - 2018 SN - 978-3-95450-191-5 DO - 10.18429/JACoW-SRF2017-TUPB087 UR - http://jacow.org/srf2017/papers/tupb087.pdf ER -