| Paper | Title | Page |
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| TPPT084 | Surface Study of Nb/Cu Films for Cavity Deposition by ECR Plasma | 4153 |
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Funding: This manuscript has been authorized by SURA, Inc. under Contract No. DE-AC05-84ER-40150 with the U.S. Department of Energy. Deposition of thin niobium (Nb) films on copper (Cu) cavities, using an electron cyclotron resonance (ECR) plasma appears to be an attractive alternative technique for fabricating superconducting radio frequency cavities to be used in particle accelerators. The performance of these Nb/Cu cavities is expected to depend on the surface characteristics of the Nb films. In this paper, we report on an investigation of the influence of deposition energy on surface morphology, microstructure, and chemical composition of Nb films deposited on small Cu disks employing a metallographic optical microscope, a 3-D profilometer, a scanning electron microscope, and a dynamic secondary ion mass spectrometer. The results will be compared with those obtained on Nb surfaces treated by buffered chemical polishing, electropolishing, and buffered electropolishing. Possible implications from this study for Nb deposition on real Cu cavities will be discussed. |
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| TPPT085 | Niobium Thin Film Coating on a 500-MHz Copper Cavity by Plasma Deposition | 4167 |
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Funding: This work was supported by DOE contract DE-AC05-84ER40150 Modification No. M175, under which the Southeastern Universities Research Association (SURA) operates the Thomas Jefferson National Accelerator Facility. A system for the deposition, using an ECR plasma source, of a thin film of niobium inside a copper cavity for superconducting accelerator applications has been designed and is being constructed. The system uses a 500-MHz copper cavity as the substrate and the vacuum chamber. The ECR plasma will be created to produce direct niobium ion deposition. The central cylindrical grid is biased to realize the energy controlled deposition. This report describes the design of several subcomponents including the vacuum chamber, RF supply, biasing grid and magnet coils. Operational parameters are compared between a working small-sample deposition system and this system. Initial plasma simulation also suggested that plasma ignition in this cavity system is feasible. |