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Deposition of Non-Evaporative Getters R&D Activity for HEPS-TF |
ion, vacuum, cathode, site |
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- P. He, D.Z. Guo, B. Liu, Y. Ma, Y.C. Yang, L. Zhang
IHEP, Beijing, People's Republic of China
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Non Evaporable Getter(NEG) coating technology was widely used around the world's ultra-low emittance storage rings. It will provide the distributed pumping which is the obvious solution to solve the conductance limitation of narrow vacuum chamber at small magnet aperture. The HEPS-TF is the R&D project of HEPS (High Energy Photon Source), it will cover all of the key technology for HEPS accelerator system and beamlines. In order to meet the small aperture vacuum chamber distributed pumping requirement, the NEG coating R&D for HEPS vacuum chamber is under the way. Getter films deposited on the inner surface of the chamber would transform the vacuum chamber from an outgassing source into a pump. The coating test bench will be shown here and coating procedure will be presented.
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| DOI • |
reference for this paper
※ https://doi.org/10.18429/JACoW-NAPAC2016-MOPOB81
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