| Paper | Title | Page |
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WEPPP059 |
Design of a High Stability Six Degrees of Freedom Precision Adjustable Mirror Box | |
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| With the construction of synchrotron radiation light source entering the fourth generation light source stage of low emissivity and high brightness, the requirements for the resolution and stability of beam line optical equipment are getting higher and higher. This paper designs and analyzes a high stability six degrees of freedom precision adjustment mirror box. The vibration natural frequency of optical elements is 70.5Hz, the horizontal and vertical vibration amplification coefficient is 1.46 times of the X-axis of the optical path, and the vibration displacement RMS value is 35.8nm, Meet the requirement that the mirror vibration of the fourth generation light source beam optical equipment should not exceed 50nm. | ||
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