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RIS citation export for WEPPP059: Design of a High Stability Six Degrees of Freedom Precision Adjustable Mirror Box

TY  - UNPB
AU  - Zhou, W.Y.
AU  - Xia, X.
ED  - Schaa, Volker R.W.
ED  - Bian, Lin
ED  - Chen, Zhichu
ED  - Dong, Yuhui
ED  - He, Ping
TI  - Design of a High Stability Six Degrees of Freedom Precision Adjustable Mirror Box
J2  - Proc. of MEDSI2023, Beijing, China, 06-10 November 2023
CY  - Beijing, China
T2  - International Conference on Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation
T3  - 12
LA  - english
AB  - With the construction of synchrotron radiation light source entering the fourth generation light source stage of low emissivity and high brightness, the requirements for the resolution and stability of beam line optical equipment are getting higher and higher. This paper designs and analyzes a high stability six degrees of freedom precision adjustment mirror box. The vibration natural frequency of optical elements is 70.5Hz, the horizontal and vertical vibration amplification coefficient is 1.46 times of the X-axis of the optical path, and the vibration displacement RMS value is 35.8nm, Meet the requirement that the mirror vibration of the fourth generation light source beam optical equipment should not exceed 50nm.
PB  - JACoW Publishing
CP  - Geneva, Switzerland
ER  -