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| WEOBM07 |
Design, Modeling and Analysis of a Novel Piezoactuated XY Nanopositioner Supporting Beamline Optical Scanning |
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- L.F. Wang, G.C. Chang, S. Tang, Z.Y. Yue, L. Zhang
IHEP, Beijing, People’s Republic of China
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In recent years, with the advancement of X-ray optics technology, the spot size of synchrotron beamlines has been reduced to 10nm or even smaller. The reduction in spot size and the emergence of ultra-bright synchrotron sources necessitate higher stability, resolution, and faster scanning speeds for positioning systems. This paper presents the design, analysis, and simulation of an XY piezoelectric driven nanopositioning platform that supports high-precision optical scanning systems. To achieve fast and highly precise motion under the load of an optical system, a design scheme based on a hollow structure with flexible amplification and guiding mechanisms is proposed. This scheme increases displacement output while minimizing coupling displacement to ensure a high natural frequency. The rationality of this platform design is verified through modeling and finite element simulation.
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Slides WEOBM07 [3.448 MB]
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| DOI • |
reference for this paper
※ doi:10.18429/JACoW-MEDSI2023-WEOBM07
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| About • |
Received ※ 02 November 2023 — Revised ※ 03 November 2023 — Accepted ※ 04 November 2023 — Issued ※ 18 April 2024 |
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