IHEP, Beijing, People’s Republic of China
IHEP CSNS, Guangdong Province, People’s Republic of China
Advanced light source require small wavefront distortion to maintain the quality of the X-ray beam. Active optical wavefront correction technology is a very important solution to solve the service problems of ultra-precise devices under such conditions. In this paper, we will report our recent progress on this active optics system development including surface metrology and mirror modulation. Based on the research of laser-heating-based thermal deformation modulation technology, this project proposes to modify the mirror surface of X-ray mirrors based on semiconductor microfabrication process, and modulate the local deformation of the mirror surface by electric heating to realize the surface shape correction /modulation of X-ray mirrors. Since the modulation unit acts directly on the reflective region of the mirror surface, it has a better surface shape correction capability than the conventional body deformation modulation. The solution also has the advantage of high efficiency and low cost.
*Yang F, Li M, Gao L, et al. Laser-heating-based active optics for synchrotron radiation applications[J]. Optics Letters, 2016, 41(12): 2815-2818.
