JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
TY - CONF AU - Yang, F.G. AU - Diao, D.Z. AU - Dong, H. AU - Han, J. AU - Kang, L. AU - Li, M. AU - Sheng, W.F. AU - Wang, S.F. AU - Zhang, X.W. ED - Schaa, Volker R.W. ED - Bian, Lin ED - Chen, Zhichu ED - Dong, Yuhui ED - He, Ping TI - Thermal-Deformation-Based X-Ray Active Optics Development in IHEP J2 - Proc. of MEDSI2023, Beijing, China, 06-10 November 2023 CY - Beijing, China T2 - International Conference on Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation T3 - 12 LA - english AB - Advanced light source require small wavefront distortion to maintain the quality of the X-ray beam. Active optical wavefront correction technology is a very important solution to solve the service problems of ultra-precise devices under such conditions. In this paper, we will report our recent progress on this active optics system development including surface metrology and mirror modulation. Based on the research of laser-heating-based thermal deformation modulation technology, this project proposes to modify the mirror surface of X-ray mirrors based on semiconductor microfabrication process, and modulate the local deformation of the mirror surface by electric heating to realize the surface shape correction /modulation of X-ray mirrors. Since the modulation unit acts directly on the reflective region of the mirror surface, it has a better surface shape correction capability than the conventional body deformation modulation. The solution also has the advantage of high efficiency and low cost. PB - JACoW Publishing CP - Geneva, Switzerland SP - 10 EP - 14 KW - optics KW - synchrotron KW - vacuum KW - radiation KW - synchrotron-radiation DA - 2024/07 PY - 2024 SN - 2673-5520 SN - 978-3-95450-250-9 DO - doi:10.18429/JACoW-MEDSI2023-TUOAM05 UR - https://jacow.org/medsi2023/papers/tuoam05.pdf ER -