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| THPPP015 |
Mechanical Design of the Novel Precise Secondary Source Slits |
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- X.X. Yan, Y.J. Gong, Z. Ji, J.Y. Liu, H. Qin
IASF, Shenzhen, Guangdong, People’s Republic of China
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High-precision slits are extensively adopted in coherent or nano-focusing beamlines as the secondary source, which can accurately define or achieve a beam size at the micron or sub-micron scale, while maintaining high stability. This paper presents the design of a set of precise slits based on a flexure hinge mechanism, which enables a nano-scale resolution and a stroke of hundreds of microns simultaneously. The coarse or fine adjustment motion of each blade can be accomplished with or without a displacement amplification mechanism, which is driven by a piezo actuator. Furthermore, the kinematic and dynamics models are investigated through finite element analysis (FEA) and numerical analysis successively, yielding consistent results. The optimized slits system can provide a linear stroke of up to 400 um with a resolution of 10 nm both in horizontal and vertical directions, whose first Eigen frequency is 130 Hz.
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| DOI • |
reference for this paper
※ doi:10.18429/JACoW-MEDSI2023-THPPP015
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| About • |
Received ※ 25 October 2023 — Revised ※ 05 November 2023 — Accepted ※ 09 November 2023 — Issued ※ 28 November 2023 |
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