JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
TY - CONF AU - Yan, X.X. AU - Gong, Y.J. AU - Ji, Z. AU - Liu, J.Y. AU - Qin, H. ED - Schaa, Volker R.W. ED - Bian, Lin ED - Chen, Zhichu ED - Dong, Yuhui ED - He, Ping TI - Mechanical Design of the Novel Precise Secondary Source Slits J2 - Proc. of MEDSI2023, Beijing, China, 06-10 November 2023 CY - Beijing, China T2 - International Conference on Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation T3 - 12 LA - english AB - High-precision slits are extensively adopted in coherent or nano-focusing beamlines as the secondary source, which can accurately define or achieve a beam size at the micron or sub-micron scale, while maintaining high stability. This paper presents the design of a set of precise slits based on a flexure hinge mechanism, which enables a nano-scale resolution and a stroke of hundreds of microns simultaneously. The coarse or fine adjustment motion of each blade can be accomplished with or without a displacement amplification mechanism, which is driven by a piezo actuator. Furthermore, the kinematic and dynamics models are investigated through finite element analysis (FEA) and numerical analysis successively, yielding consistent results. The optimized slits system can provide a linear stroke of up to 400 um with a resolution of 10 nm both in horizontal and vertical directions, whose first Eigen frequency is 130 Hz. PB - JACoW Publishing CP - Geneva, Switzerland SP - 303 EP - 305 KW - simulation KW - alignment KW - vacuum KW - photon KW - GUI DA - 2024/07 PY - 2024 SN - 2673-5520 SN - 978-3-95450-250-9 DO - doi:10.18429/JACoW-MEDSI2023-THPPP015 UR - https://jacow.org/medsi2023/papers/thppp015.pdf ER -