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Title Zero-Length Conflat Fin-Type Nonevaporable Getter Pump Coated with Oxygen-Free Palladium/Titanium
  • Y. Sato
    Yokohama National University, Graduate School of Engineering Science, Yokohama, Japan
  • A.H. Hashimoto, M. Yamanaka
    NIMS, Tsukuba, Ibaraki, Japan
  • T. Kikuchi, K. Masepresenter
    KEK, Tsukuba, Japan
  • T. Miyazawa
    Sokendai, The Graduate University for Advanced Studies, Tsukuba, Japan
  • S. Ohno
    Yokohama National University, Yokohama, Japan
Abstract We have developed a zero-length conflat fin-type nonevaporable getter (NEG) pump that uses oxygen-free palladium/titanium (Pd/Ti)*. After baking at 150 degrees centigrade for 12 h, the pumping speeds of the NEG pump for H₂ and CO were 2350~800 L/s and 1560~20 L/s, respectively, in the pumped-quantity range 0.01~30 Pa L. The morphologies of oxygen-free Pd/Ti films on the partition plates and the base plate were examined by scanning electron microscopy, scanning transmission electron microscopy, and energy-dispersive X-ray spectroscopy. The Ti was completely coated with Pd on the bottom, whereas the partition plates were covered by Pd/Ti nanostructures. Our new NEG pump is ideal for maintaining ultrahigh vacuums in the range 10⁻⁸ to 10⁻⁹ Pa, because (a) its pumping speeds for H₂ and CO are quite large, (b) it can evacuate H₂O and CO₂ when an ionization gauge is used in the vacuum system, (3) it can be activated by baking at 150 degrees centigrade for 12 h, (c) its pumping speed does not decrease even after 9 cycles of pumping, baking, cooling to room temperature, and exposure to air**, (5) it requires neither a dedicated power supply nor electric feedthroughs, and (6) it is space saving and lightweight.
Footnotes & References *T. Miyazawa et al., J. Vac. Sci. Technol. A 36, 051601 (2018).
**T. Kikuchi et al., AIP Conf. Proc. 2054, 060046 (2019).
Funding This work was partly supported by a JSPS KAKENHI (JP19K05280), a TIA-Kakehashi (TK19-035), and the 2019 Takahashi Industrial Economic Research Foundation grant, and was supported by NIMS TEM Station.
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Conference MEDSI2020
Series Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation (11th)
Location Chicago, IL, USA
Date 24-29 July 2021
Publisher JACoW Publishing, Geneva, Switzerland
Editorial Board Yifei Jaski (ANL, Lemont, IL, USA); Patric Den Hartog (ANL, Lemont, IL, USA); Kelly Jaje (ANL, Lemont, IL, USA); Volker R.W. Schaa (GSI, Darmstadt, Germany)
Online ISBN 978-3-95450-229-5
Online ISSN 2673-5520
Received 30 July 2021
Accepted 14 October 2021
Issue Date 08 November 2021
DOI doi:10.18429/JACoW-MEDSI2020-TUOA03
Pages 107-110
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