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TY - CONF AU - Sato, Y. AU - Hashimoto, A.H. AU - Kikuchi, T. AU - Mase, K. AU - Miyazawa, T. AU - Ohno, S. AU - Yamanaka, M. ED - Jaski, Yifei ED - Den Hartog, Patric ED - Jaje, Kelly ED - Schaa, Volker R.W. TI - Zero-Length Conflat Fin-Type Nonevaporable Getter Pump Coated with Oxygen-Free Palladium/Titanium J2 - Proc. of MEDSI2020, Chicago, IL, USA, 24-29 July 2021 CY - Chicago, IL, USA T2 - Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation T3 - 11 LA - english AB - We have developed a zero-length conflat fin-type nonevaporable getter (NEG) pump that uses oxygen-free palladium/titanium (Pd/Ti)*. After baking at 150 degrees centigrade for 12 h, the pumping speeds of the NEG pump for H₂ and CO were 2350~800 L/s and 1560~20 L/s, respectively, in the pumped-quantity range 0.01~30 Pa L. The morphologies of oxygen-free Pd/Ti films on the partition plates and the base plate were examined by scanning electron microscopy, scanning transmission electron microscopy, and energy-dispersive X-ray spectroscopy. The Ti was completely coated with Pd on the bottom, whereas the partition plates were covered by Pd/Ti nanostructures. Our new NEG pump is ideal for maintaining ultrahigh vacuums in the range 10⁻⁸ to 10⁻⁹ Pa, because (a) its pumping speeds for H₂ and CO are quite large, (b) it can evacuate H₂O and CO₂ when an ionization gauge is used in the vacuum system, (3) it can be activated by baking at 150 degrees centigrade for 12 h, (c) its pumping speed does not decrease even after 9 cycles of pumping, baking, cooling to room temperature, and exposure to air**, (5) it requires neither a dedicated power supply nor electric feedthroughs, and (6) it is space saving and lightweight. PB - JACoW Publishing CP - Geneva, Switzerland SP - 107 EP - 110 KW - vacuum KW - ECR KW - site KW - power-supply KW - electron DA - 2021/10 PY - 2021 SN - 2673-5520 SN - 978-3-95450-229-5 DO - doi:10.18429/JACoW-MEDSI2020-TUOA03 UR - https://jacow.org/medsi2020/papers/tuoa03.pdf ER -