IPAC2022 - List of Authors (Jeromin, A.)

Paper	Title	Page
TUPOTK013	PEALD SIS Studies for SRF Cavities	1222
SUSPMF107	use link to see paper's listing under its alternate paper code
	I. González Díaz-Palacio, R.H. Blick, A. Stierle, R. Zierold University of Hamburg, Hamburg, Germany W. Hillert, M. Wenskat University of Hamburg, Institut für Experimentalphysik, Hamburg, Germany A. Jeromin DESY Nanolab, FS-NL, Hamburg, Germany T.F. Keller, N. Krupka, M. Wenskat DESY, Hamburg, Germany
	Recent technological advances and material treatments have pushed Nb SRF cavities to their maximum RF performance. A novel approach for overcoming this limitation, which takes advantage of RF field only penetrates into the superconductor at a certain distance called London penetration depth, is nano-structuring multilayers with PEALD (plasma-enhanced atomic layer deposition). SIS (superconductor-insulator-superconductor) multilayers provide magnetic screening of the bulk Nb cavity, increasing the field at which the vortex penetration starts, and higher quality factor. ALD is closely related to chemical vapor deposition and bases on sequential self-limit gas-solid surface reactions facilitating conformal coatings with sub-nm precision even on complex substrates such as the interior of a cavity. As a preliminary study for SIS SRF cavities, we investigated the AlN-NbTiN/NbN multilayers grown by PEALD. Different compositions, thicknesses, and post-deposition thermal treatments have been investigated. The characterization results of superconducting properties, elemental composition, crystallinity, and cross-section are shown in this contribution.
DOI •	reference for this paper ※ https://doi.org/10.18429/JACoW-IPAC2022-TUPOTK013
About •	Received ※ 09 June 2022 — Revised ※ 14 June 2022 — Accepted ※ 15 June 2022 — Issue date ※ 27 June 2022
Cite •	reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)

Paper

Title

Page

TUPOTK013

PEALD SIS Studies for SRF Cavities

1222

SUSPMF107

use link to see paper's listing under its alternate paper code

I. González Díaz-Palacio, R.H. Blick, A. Stierle, R. Zierold
University of Hamburg, Hamburg, Germany
W. Hillert, M. Wenskat
University of Hamburg, Institut für Experimentalphysik, Hamburg, Germany
A. Jeromin
DESY Nanolab, FS-NL, Hamburg, Germany
T.F. Keller, N. Krupka, M. Wenskat
DESY, Hamburg, Germany

Recent technological advances and material treatments have pushed Nb SRF cavities to their maximum RF performance. A novel approach for overcoming this limitation, which takes advantage of RF field only penetrates into the superconductor at a certain distance called London penetration depth, is nano-structuring multilayers with PEALD (plasma-enhanced atomic layer deposition). SIS (superconductor-insulator-superconductor) multilayers provide magnetic screening of the bulk Nb cavity, increasing the field at which the vortex penetration starts, and higher quality factor. ALD is closely related to chemical vapor deposition and bases on sequential self-limit gas-solid surface reactions facilitating conformal coatings with sub-nm precision even on complex substrates such as the interior of a cavity. As a preliminary study for SIS SRF cavities, we investigated the AlN-NbTiN/NbN multilayers grown by PEALD. Different compositions, thicknesses, and post-deposition thermal treatments have been investigated. The characterization results of superconducting properties, elemental composition, crystallinity, and cross-section are shown in this contribution.

DOI •

reference for this paper ※ https://doi.org/10.18429/JACoW-IPAC2022-TUPOTK013

About •

Received ※ 09 June 2022 — Revised ※ 14 June 2022 — Accepted ※ 15 June 2022 — Issue date ※ 27 June 2022

Cite •

reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)