JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
TY - CONF AU - González Díaz-Palacio, I. AU - Blick, R.H. AU - Hillert, W. AU - Jeromin, A. AU - Keller, T.F. AU - Krupka, N. AU - Stierle, A. AU - Wenskat, M. AU - Zierold, R. ED - Zimmermann, Frank ED - Tanaka, Hitoshi ED - Sudmuang, Porntip ED - Klysubun, Prapong ED - Sunwong, Prapaiwan ED - Chanwattana, Thakonwat ED - Petit-Jean-Genaz, Christine ED - Schaa, Volker R.W. TI - PEALD SIS Studies for SRF Cavities J2 - Proc. of IPAC2022, Bangkok, Thailand, 12-17 June 2022 CY - Bangkok, Thailand T2 - International Particle Accelerator Conference T3 - 13 LA - english AB - Recent technological advances and material treatments have pushed Nb SRF cavities to their maximum RF performance. A novel approach for overcoming this limitation, which takes advantage of RF field only penetrates into the superconductor at a certain distance called London penetration depth, is nano-structuring multilayers with PEALD (plasma-enhanced atomic layer deposition). SIS (superconductor-insulator-superconductor) multilayers provide magnetic screening of the bulk Nb cavity, increasing the field at which the vortex penetration starts, and higher quality factor. ALD is closely related to chemical vapor deposition and bases on sequential self-limit gas-solid surface reactions facilitating conformal coatings with sub-nm precision even on complex substrates such as the interior of a cavity. As a preliminary study for SIS SRF cavities, we investigated the AlN-NbTiN/NbN multilayers grown by PEALD. Different compositions, thicknesses, and post-deposition thermal treatments have been investigated. The characterization results of superconducting properties, elemental composition, crystallinity, and cross-section are shown in this contribution. PB - JACoW Publishing CP - Geneva, Switzerland SP - 1222 EP - 1225 KW - cavity KW - SRF KW - site KW - plasma KW - niobium DA - 2022/07 PY - 2022 SN - 2673-5490 SN - 978-3-95450-227-1 DO - doi:10.18429/JACoW-IPAC2022-TUPOTK013 UR - https://jacow.org/ipac2022/papers/tupotk013.pdf ER -