SRF2015 - List of Authors (Alves, E.)

Paper	Title	Page
TUPB040	High Power Impulse Magnetron Sputtering of Thin Films for Superconducting RF Cavities	647
	S. Wilde, B. Chesca Loughborough University, Loughborough, Leicestershire, United Kingdom E. Alves Associação EURATOM/IST, Instituto de Plasmas e Fusão Nuclear, Lisboa, Portugal N.P. Barradas Universidade de Lisboa, Instituto Superior Técnico, Bobadela, Portugal A.N. Hannah, O.B. Malyshev, S.M. Pattalwar, R. Valizadeh STFC/DL/ASTeC, Daresbury, Warrington, Cheshire, United Kingdom G.B.G. Stenning STFC/RAL/ISIS, Chilton, Didcot, Oxon, United Kingdom
	The production of superconducting coatings for radio frequency cavities is a rapidly developing field that should ultimately lead to acceleration gradients greater than those obtained by bulk Nb RF cavities. Optimizing superconducting properties of Nb and Nb compound thin-films is therefore essential. Nb films were deposited by magnetron sputtering in pulsed DC mode onto Si (100) and MgO (100) substrates and also by high impulse magnetron sputtering (HiPIMS) onto Si (100), MgO (100) and polycrystalline Cu. HiPIMS was then used to deposit NbN and NbTiN thin films onto Si(100) and polycrystalline Cu. The films were characterised using scanning electron microscopy, x-ray diffraction, DC SQUID magnetometry and Q factor for a flat thin film sample.
Export •	reference for this paper to ※ BibTeX, ※ LaTeX, ※ Text, ※ RIS/RefMan, ※ EndNote (xml)

Paper

Title

Page

High Power Impulse Magnetron Sputtering of Thin Films for Superconducting RF Cavities

647

S. Wilde, B. Chesca
Loughborough University, Loughborough, Leicestershire, United Kingdom
E. Alves
Associação EURATOM/IST, Instituto de Plasmas e Fusão Nuclear, Lisboa, Portugal
N.P. Barradas
Universidade de Lisboa, Instituto Superior Técnico, Bobadela, Portugal
A.N. Hannah, O.B. Malyshev, S.M. Pattalwar, R. Valizadeh
STFC/DL/ASTeC, Daresbury, Warrington, Cheshire, United Kingdom
G.B.G. Stenning
STFC/RAL/ISIS, Chilton, Didcot, Oxon, United Kingdom

The production of superconducting coatings for radio frequency cavities is a rapidly developing field that should ultimately lead to acceleration gradients greater than those obtained by bulk Nb RF cavities. Optimizing superconducting properties of Nb and Nb compound thin-films is therefore essential. Nb films were deposited by magnetron sputtering in pulsed DC mode onto Si (100) and MgO (100) substrates and also by high impulse magnetron sputtering (HiPIMS) onto Si (100), MgO (100) and polycrystalline Cu. HiPIMS was then used to deposit NbN and NbTiN thin films onto Si(100) and polycrystalline Cu. The films were characterised using scanning electron microscopy, x-ray diffraction, DC SQUID magnetometry and Q factor for a flat thin film sample.

Export •

reference for this paper to ※ BibTeX, ※ LaTeX, ※ Text, ※ RIS/RefMan, ※ EndNote (xml)