PAC2013 - List of Authors (Sato, R.)

Paper	Title	Page
THPSM03	Direct Diagnostic Technique for a High Intensity Laser Based on Laser Compton Scattering	1394
	R. Sato, A. Endo, K. Nonomura, K. Sakaue, M. Washio, Y. Yoshida Waseda University, Tokyo, Japan
	Funding: Work supported by NEDO (New Energy and Industrial Technology Development Organization). In laser produced plasma (LPP) EUV source, high intensity pulse CO2 laser is essential for plasma generation. To achieve high conversion efficiency and stable EUV power, we would like to measure laser profile in collision point and make feedback system. There is no way to directly measure high intensity lasers profile. Therefore, we have been developing laser profiler based on laser Compton scattering. Laser profile can be measured by scanning focused electron beam while measuring Compton signal. We use compact electron accelerator based on Cs-Te photocathode RF gun at WASEDA university. Electron beam is focused by Solenoid lens. We simulated beam size using GPT, obtained beam size of 10 μm rms. We measured beam size by GAFCHROMIC FILM HD 810. We have succeeded in observing minimum beam size of about 20 μm rms. In this conference, we will report result of simulation, beam size measurements, and the present progress.

Paper

Title

Page

Direct Diagnostic Technique for a High Intensity Laser Based on Laser Compton Scattering

1394

R. Sato, A. Endo, K. Nonomura, K. Sakaue, M. Washio, Y. Yoshida
Waseda University, Tokyo, Japan

Funding: Work supported by NEDO (New Energy and Industrial Technology Development Organization).
In laser produced plasma (LPP) EUV source, high intensity pulse CO2 laser is essential for plasma generation. To achieve high conversion efficiency and stable EUV power, we would like to measure laser profile in collision point and make feedback system. There is no way to directly measure high intensity lasers profile. Therefore, we have been developing laser profiler based on laser Compton scattering. Laser profile can be measured by scanning focused electron beam while measuring Compton signal. We use compact electron accelerator based on Cs-Te photocathode RF gun at WASEDA university. Electron beam is focused by Solenoid lens. We simulated beam size using GPT, obtained beam size of 10 μm rms. We measured beam size by GAFCHROMIC FILM HD 810. We have succeeded in observing minimum beam size of about 20 μm rms. In this conference, we will report result of simulation, beam size measurements, and the present progress.